CVD in Fiber, Powder, and Monolithic Applications

CVD is used in the industrial production of inorganic structural fibers such as boron and silicon carbide. Boron fibers are, in 

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CVD in Fiber, Powder, and Monolithic Applications 467 2.3 The CVD Process for Fiber Production... 

Chemical vapor deposition (C VD) is a versatile process suitable for the manufacturing of coatings, powders, fibers, and monolithic components. With CVD, it is possible to produce most metals, many nonmetallic elements such as carbon and silicon as well as a large number of compounds including carbides, nitrides, oxides, intermetallics, and many others. This technology is now an essential factor in the manufacture of semiconductors and other electronic components, in the coating of tools, bearings, and other wear-resistant parts and in many optical, optoelectronic and corrosion applications. The market for CVD products in the U.S. and abroad is expected to reach several billions dollars by the end of the century. 

The CVD method involves a chemical reaction in a vapor phase which results in deposition of a solid on a heated surface. Various PVD processes such as ion plating, sputtering, molecular beam, evaporation, and epitaxy might be also included in CVD processes [112]. The various CVD methods are powerful processes used for the fabrications of a wide variety of thin-film materials including solar cell materials and semiconductor materials for electronic applications, as well as the manufacture of coatings, powders, fibers, and monolithic components. There are two types of CVD reactors, the differential reactor and the starved reactor, according to the value of the flow rate (F,) defined as... 

In this book, the CVD applications are classified by product functions such as electrical, opto-electrical, optical, mechanical and chemical. This classification corresponds roughly to the various segments of industry such as the electronic industry, the optical industry, the tool industry, and the chemical industry. CVD applications are also classified by product forms such as coatings, powders, fibers, monoliths, and composites. 

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