Thin-film technologies multicomponent films

Thin films are used for a variety of applications In the microelectronics Industry. As the technology has advanced, the control of contaminants, thicknesses, and Interfaces of thin films has become more critical. Following deposition of multicomponent structures, further processing or thermal stress after packaging may result In a redistribution of the... 

M. Thomas, Multicomponent Glasses from the Sol-Gel Process, Sol-Gel Technology for Thin Films, Fibers, Preforms, Electronics and Specialty Shapes (L. C. Klein, Ed.), Noyes Publications, Park Ridge, NJ, pp. 2-15, 1988. 

Important features of the sol-gel method are better homogeneity compared to the traditional ceramic method, high purity, lower processing temperature, more uniform phase distribution in multicomponent systems, better size and morphological control, the possibility of preparing new crystalline and non-crystalline materials and, lastly, easy preparation of thin films and coalings. The sol-gel method is widely used in ceramic technology and the subject has been widely reviewed [1-3]. 

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