Spark source mass accuracy

C. W. Magee. Critical Parameters Affecting Precision and Accuracy in Spark Source Mass Spectrometry with Electrical Detection. PhD thesis, Univetsity of Virginia, University Microfilms, Ann Arbot, MI, 1973. 

Because GDMS can provide ultratrace analysis with total elemental coverage, the technique fills a unique analytical niche, supplanting Spark-Source Mass Spectrometry (SSMS) by supplying the same analysis with an order-of-magnitude better accuracy and orders-of-magnitude improvement in detection limits. GDMS analy-... 

Applications Real applications of spark-source MS started on an empirical basis before fundamental insights were available. SSMS is now considered obsolete in many areas, but various unique applications for a variety of biological substances and metals are reported. Usually, each application requires specific sample preparation, sparking procedure and ion detection. SSMS is now used only in a few laboratories worldwide. Spark-source mass spectrometry is still attractive for certain applications (e.g. in the microelectronics industry). This is especially so when a multi-element survey analysis is required, for which the accuracy of the technique is sufficient (generally 15-30% with calibration or within an order of magnitude without). SSMS is considered to be a... 

A set of samples was analyzed by neutron activation analysis (NAA) and spark source mass spectrometry. Some of these results are shown in Table III. The diflFerences correspond to the range of accuracies shown in Table II except possibly for some of the iron results. In those cases it was felt that the NAA samples were contaminated. 

The role of Spark Source Mass Spectrography (SSMS) as a high sensitivity trace element analytical method is discussed. The unparalleled combination of sensitivity and complete element coverage makes SSMS especially suitable for the analysis of liquid and solid materials involved in semiconductor processing. Sample requirements are discussed. The application of SSMS to semiconductor materials, process reagents, dopants, and metals, is Illustrated. Advantages and disadvantages of the technique as well as sensitivity and accuracy are discussed. 

Taylor S.R. and Gorton M.P., 1977, Geochemical applications of spark-source mass spectrography, III. Element sensitivity, precision and accuracy. Ceochim. Cosmochim. Acta, 41, 1375-1380. 

In most analytical procedures, calibration is carried out by means of a calibration curve using com-pound(s) prepared with chemicals of an appropriate purity and verified stoichiometry. Matrix effects must often be taken into account and, consequently, the calibration solutions should be matrix-matched. CRMs of pure compounds may be used for calibration. However, matrix CRMs should in principle not be used for the purpose of calibration unless no other suitable calibrants are available, with the exception of those methods (e.g., spark source mass spectrometry, wavelength-dispersive XRF, etc.) that require calibration with CRMs of a similar, fully characterized matrix (e.g., metal alloys, cements). For such methods, accuracy can only be achieved when certified RMs are used for the calibration. 

R. A. Bingham and R. M. Elliott, Accuracy of analysis by electrical detection in spark source mass spectrometry. Anal. Chem. 43, 43-54 (1971). 

Spectroscopic methods for the deterrnination of impurities in niobium include the older arc and spark emission procedures (53) along with newer inductively coupled plasma source optical emission methods (54). Some work has been done using inductively coupled mass spectroscopy to determine impurities in niobium (55,56). X-ray fluorescence analysis, a widely used method for niobium analysis, is used for routine work by niobium concentrates producers (57,58). Paying careful attention to matrix effects, precision and accuracy of x-ray fluorescence analyses are at least equal to those of the gravimetric and ion-exchange methods. 

Nicholls, G.D., A.L. Graham, E. Williams and M. Wood, 1967, Precision and accuracy in trace element analysis of geological materials using solid source spark mass spectrography. Anal. Chem. 39, 584. 

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