Solution-phase deposition

Milliron, D. I Raoux, S. Shelby, R. M. Jordan-Sweet, J. 2007. Solution-phase deposition and nanopatterning of GeSbSe phase-change materials. Nature Mater. 6 352-356. 

Successive Ionic Layer Adsorption and Reaction (SILAR) and Related Sequential Solution-Phase Deposition Techniques... 

SILAR AND RELATED SEQUENTIAL SOLUTION-PHASE DEPOSITION TECHNIQUES... 

TABLE 8.4. Films Grown by ILGAR, ECALE, and Other Sequential Solution-Phase Deposition Methods... 

Other Sequential Solution-Phase Deposition Techniques 270... 

Electrodeposition is by its nature a condensed phase process, whereas most studies of ALE have been performed using gas phase or vacuum methodologies, CVD or MBE. A solution phase deposition methodology related to ALE has been developed in France by Nicolau et al. [27-32] (Fig. 2), in which adsorbed layers of elements are formed by rinsing a substrate in aqueous solutions containing ionic precursor for the desired elements, sequentially, in a cycle. After exposure to each precursor, the substrate is copiously rinsed and then transferred to a solution containing the precursor for the next element. The method is referred to as successive ionic layer adsorption and reaction (SILAR). Reactivity in SILAR appears to be controlled by the rinsing procedure, solution composition, pH, and specifically... 

Solution phase deposition of metal oxides is less established than deposition of metal sulfides. The chemical process for the formation of metal oxides in water can be considered to be hydrolysis of metal cations and dehydration of intermediate hydroxides, for divalent cations described as... 

Previous Methods for Solution-phase Deposition of Semiconductor... 

These conditions will ensure that snfficient flnx is maintained into deep narrow volnmes, that shadowing and depletion effects dnring deposition are minimised and that a continnons conformal coverage is obtained. There are now several solution-phase deposition techniques available that show excellent surface coverage and a few gas-phase techniques that seem similarly suitable. 

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