Semiconductor industry applications analytical

Table 9-7. Application areas and typical analytical examples in the semiconductor industry. Application area Analytical example...

SIMS and SNMS are versatile analytical techniques for the compositional characterization of solid surfaces and interfaces in materials research.92-94 As one of the most important applications, both surface analytical techniques allow depth profile analysis (concentration profile as a function of the depth analyzed) to be performed in materials science and the semiconductor industry with excellent depth resolution in the low nm range. For depth profiling in materials science, dynamic SIMS and SNMS using high primary ion beam doses are applied. Both techniques permit the analysis of light elements such as H, , C and N, which are difficult to measure with other analytical techniques. 

Vanatta LE (2001) Application of ion chromatography in the semiconductor industry. Trends in Analytical Chemistry 20 336-345. 

Owing to the rapid advances in computing power, SEM has become relatively easy. This enables development of microscopes to be focused on the analytical aspect of the problem. As a consequence, the latest generation of these instruments is increasingly being used for process and product control. This shift in the application of electron microscopes started in the semiconductor industry, where SEM is... 

The properties and processibility of PFA have allowed for the development of a wide variety of components that are used in critical wet chemical applications in the semiconductor industry including high purity bulk chemical systems, wet etching systems, stripping systems, cleaning systems, chemical mechanical planarization (CMP) system components, analytical equipment, and high purity chemical manufacturing. 

The efficiency of particulate removal will depend on the analytical requirements, but for the semiconductor industry it is typical to work in environments that contain 1 or 10 particles (<0.2 p) per cubic foot of air (class 1 and 10 clean rooms, respectively). These kinds of precautions are absolutely necessary to maintain low instrn-ment background levels for the analysis of semiconductor-related samples, but might not be required for other types of applications. So, even though contamination-free analysis is important, it might be sufficient to work in a class 100, 1000, or 10,000 clean room and still meet your cleanliness objectives. ... 

ICP-MS is used in practically every discipline where inorganic analytical support is required. This includes environmental, geological, biological, medical, nuclear, metallurgical (semiconductor industry) and nutritional studies. An important advantage of ICP-MS in quantitative analysis, required in many fields of application, is the substantial gain in precision and accuracy that can be achieved by the use of isotope-dilution mass spectrometry, where stable isotopes or... 

In principle, the applications of ICP-MS resemble those listed for OES. This technique however is required for samples containing sub-part per billion concentrations of elements. Quantitative information of nonmetals such as P, S, I, B, Br can be obtained. Since atomic mass spectra are much simpler and easier to interpret compared to optical emission spectra, ICP-MS affords superior resolution in the determination of rare earth elements. It is widely used for the control of high-purity materials in semiconductor and electronics industries. The applications also cover the analysis of clinical samples, the use of stable isotopes for metabolic studies, and the determination of radioactive and transuranic elements. In addition to outstanding analytical features for one or a few elements, this technique provides quantitative information on more than 70 elements present from low part-per-trillion to part-per-million concentration range in a single run and within less than 3 min (after sample preparation and calibration). Comprehensive reviews on ICP-MS applications in total element determinations are available. " ... 

THz sensing and imaging technology is relatively new with numerous applications from sectors as diverse as semiconductor, medical, manufacturing, space, and defense industries. In this chapter, a broad survey of terahertz-biodetection technology from its infancy to more recent biomedical use is presented. The focus is directed mainly on terahertz radiations that can be specifically applied to label-free ligand-analyte interaction. The uniqueness, limitations, and potential capabilities of THz biosensor are discussed. 

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