Scanning tunnelling lithography

Marrian C R K, Perkins F K, Brandow S L, Koloski T S, Dobisz E A and Calvert J M 1994 Low voltage electron beam lithography in self-assembled ultrathin films with the scanning tunneling microscope Appi. Rhys. Lett. 64 390... 

In the traditional lithography approach, researchers continued to consider the idea that modem STM (scanning tunnel Microscopy) could be the proper tool for the formation of two-junction systems when working with very small particles. This consideration had related the studies of single-electron phenomena to the concept of quantum dots (Glazman and Shechter 1989). 

The methods that are commonly used to produce semiconductors and electronic materials are now being used in catalyst preparation. As recently reported, lithography has been used to deposit metal in predetermined patterns. Deposition of small clusters using nano-scale scanning tunneling microscopic tip has also been demonstrated. 

ZW Tian, ZD Fen, ZQ Tian, XD Zhuo, JQ Mu, CZ Li, HS Lin, B Ren, ZX Xie, WL Hu. Confined etchant layer technique for 2-dimensional lithography at high resolution using electrochemical scanning-tunneling-microscopy. Faraday Discuss 94 37-44, 1992. 

Fig. 6 Scanning tunneling microscope images of precision donor devices made with hydrogen lithography (a) A metal wire which displayed Ohmic conductivity. From B. Weber eta/.. Science, 2012, 335, 64. Reprinted with permission from AAAS. (b) A singleatom transistor. Reprinted with permission from Macmillan Publishers Ltd M. Fuechsle et at., Nature Nanotechnology, 1, 242, copyright 2012 and (c) an SET to readout the state of the cluster of phosphorous atoms. Reprinted with permission from Macmillan Publishers Ltd H. Buch etal., Nature Communications, 4, 2017, copyright 2013.

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