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Scanning capacitance microscopy

Group 14 (IV) elements as, 22 232 high throughput experimentation, 7 382t, 414t hydrides in, 13 609 introduction of dopants into, 14 428 ion dose for, 14 427 photon interaction with, 23 33—34 as photosensitive materials, 22 716 scanning capacitance microscopy,... [Pg.829]

P Strong indication for p-type conducting surface areas on P-doped ZnO thin hlms by scanning capacitance microscopy SCM [58]... [Pg.335]

Additionally, problems related to resolution and reliability can occur from the variation of the contact area. Great care has to be taken to optimise the feedback parameters, so that the indentation depth of the tip is as constant as possible. A recent publication [442], focussing on scanning capacitance microscopy, adds to this list the problem of adsorbed water, present at least at elevated relative humidity. Due to the high dielectric constant of water... [Pg.174]

Many-pass techniques Electric Force Microscopy (EFM) Scanning Capacitance Microscopy (SCaM) Kelvin Probe Microscopy (SKM) DC Magnetic Force Microscopy (DC MFM) AC Magnetic Force Microscopy (AC MFM) Dissipation Force Microscopy-Scanning Surface Potential Microscopy (SSPM) Scanning Maxwell Stress Microscpy (SMMM) Magnetic Force Microscopy (MFM) Van der Waals Force Microscopy (VDWFM)... [Pg.358]

Recently, scanning capacitance microscopy (SCM) using a fine tip has been developed to investigate two-dimensional dopant profiling of semiconductor surfaces [4]. [Pg.156]

Scanning Capacitance Microscopy (SCM) is capable of providing carrier concentration maps to a spatial resolution of a few tens of nanometers. The sample may be a conductor or a semiconductor. Information is derived by measuring the... [Pg.330]

Williams, C. C. (1999). Two-dimensional dopant profiling by scanning capacitance microscopy, Anna. Rev. Materials Sci. 29,471-504. [Pg.478]

See other pages where Scanning capacitance microscopy is mentioned: [Pg.77]    [Pg.569]    [Pg.821]    [Pg.112]    [Pg.146]    [Pg.153]    [Pg.136]    [Pg.90]    [Pg.171]    [Pg.230]    [Pg.595]    [Pg.245]    [Pg.301]    [Pg.11]    [Pg.436]    [Pg.2958]    [Pg.1443]    [Pg.1804]    [Pg.507]    [Pg.776]    [Pg.336]    [Pg.595]    [Pg.595]    [Pg.595]    [Pg.48]    [Pg.261]    [Pg.268]    [Pg.266]    [Pg.475]    [Pg.475]   
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See also in sourсe #XX -- [ Pg.301 ]

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