Rotary table method

Method (2) is the rotary table method that is most commonly used today. In this method, a pad is affixed to a table, slurry is dropped onto the pad, a wafer is pressed against the pad with the wafer s face facing down, and the table and wafer are rotated. In these conditions, the wafer is polished. Over the past decades, various types of equipment that are described below have been developed and released to the market. Nowadays, the rotary table method is the mainstream in semiconductor manufacturing. Therefore, this chapter describes the rotary table method. 

Method (3) is a kind of rotary table method however, multiple carriers are prepared. The aim of the multiple carriers is to improve throughput. However, when the adequacy of CMP for semiconductor devices is considered, a method with multiple carriers has greater difficulty in improving planarity performance than a method with one single carrier. Therefore, method (3) is no longer used. 

Method (7) is a small table method. In the rotary table methods such as (2), (3), and... 

This chapter has so far described the types of CMP methods that have been developed or launched and the types of CMP methods that are now the mainstream. From now on, this chapter wUl concentrate on the rotary table method that is now widely used. 

At first, general carriers used for the rotary table method are described. Figure 16.6 shows a photo of a carrier mounted on a typical table. 

The alternative method of sample extrac tion is termed the ctoss-sti eam samphng method, or ci o.s.s-belt when used in conjunc tiou with a belt conveyor. Sample extraction typically take place with a belt conveyor in motion. However, with a rotary table-feeder conveyor, extractions are made with the table stopped. A cutter can perform extractions by this means from a machined flat surface with neghgible... 

In the proprietary rotary hearth method of calcining coke, green coke is fed to the perimeter of the rotating circular table and gently moved toward the center of the hearth in a circular path by stationary rabbles. A combustion zone above the coke bed, formed by liberated volatiles, supplies the heat necessary for calcination. A rotating hearth furnace can also be equipped with energy efficient features, such as steam generation and air preheat. 

Figure 5.7 shows that positive-displacement compressors, like vacuum pumps, are divided into two main classes reciprocating and rotary. Table 5.4 lists characteristics of these compressors. Ludwig [14] discusses compression equipment and calculation methods in detail. 

Double-roll presses and rotary table presses are available for briquetting bituminous coal. Different processes for controlling the briquetting process were derived by development of methods for measuring pressing pressure with double-roll presses. Normally double-roll presses have a roll diameter between 24 and 60 in. (600-1500 mm) and the compression ratio does not usually exceed 2.5 1. In general, the compression time for the briquette form is less than 0.05. 

Table 18.7. Typical Abrasion Resistance (Rotary-Drum Method) Values (Ranges) of Some Common Fertilizers -... 

Relative movement between the parison head and mold is necessary so that parison extrusion can proceed continuously while the mold is closed. This is achieved in many different ways. The mold may be lowered, moved aside laterally, or swung aside on an accurate path. Alternatively, the extruder may be moved while the mold remains stationary. Often, two molds are used in a shuttle arrangement, so that one is open for parison extrusion while the other is performing the blowing cycle. One method of mold movement results in very high production rates. In such machines, generally known as wheel machines, a number of molds are mounted on a rotary table. Movement of the table carries the closed mold away and presents a new open mold to the die head, allowing extrusion to continue. 

Rota.ryAgita.ted Columns. Because of the mechanical advantages of rotary agitation, most modem differential contactors employ this method. The best known of the commercial rotary agitated contactors are shown in Eigure 15. Eeatures and appHcations of these columns ate given in Table 3. 

A rotary apparatus is used for metal evaporation as shown in Fig. 1. Similar equipment is employed for the preparation of organometallics. For Au clusters, Au metal is evaporated from a resistively heated W boat onto an ethanol film, in which the reactants, e.g., AufPAr IX and/or PAr, are dissolved (see Table 1, method B, 8.2.2.2). 

As shown in Table 1, the two methods for removal of volatile compounds from coffee gave different results. The rotary evaporation technique yielded a distillate with an aroma that... 

In addition, for force-time diagrams different methods to characterize the tableting process were developed. These methods can be divided in those applicable to force-time curves from eccentric and rotary tableting machines [90] and those applicable only to data from eccentric or rotary tableting machines (Tables 3-5). 

---