SEARCH Articles Figures Tables Deep RIE Oxygen RIE pattern transfer RIE Etch Back RIE-etched silicon RIE—See Reactive ion etching Rearrangements in the excited states RIES) Ried, W„ Heinz, B„ Four-Membered Rings Ried, W„ Heinz, B„ Four-Membered Rings Containing One Sulfur Atom Ries crater Ries, Nancy Silicon RIE Three-layer RIE PCM Two-layer spun-on RIE PCM