RIE-etched silicon

Figure 2.13 Examples of RIE etched silicon, with friendly permission of the Technical University of llmenau, Faculty of Mechanical Engineering, Department of Micromechanical Systems.(a) Circular channels, (b) channel with a through-hole and (c) adjustment mark.

Representative results of microdevices fabricated with hot embossing are illustrated in Fig. 9. An SEM of a microchaimel array of a flow cytometry system embossed in PC using an RIE-etched silicon master [17] is illustrated in Fig. 9a. Small micrometer-sized channels... 

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