SEARCH Articles Figures Tables Atomic layer deposition precursors Chemical Vapour Deposition Precursors and Their Classification Chemical vapor deposition metal oxide film precursors Chemical vapor deposition precursor delivery Chemical vapor deposition, Group 2 element precursors Chemical vapour deposition precursors Dominant precursor deposition Film Deposition Using Metal-Organic Precursors Group 2 Element Precursors for the Chemical Vapor Deposition Metal oxide chemical vapor deposition precursors Precursor for chemical vapor deposition Precursors, chemical vapor deposition Selection Criteria for Chemical Vapour Deposition Precursors Surface speciation/structure of the deposited precursor species