Group 2 Element Precursors for the Chemical Vapor Deposition

Group 2 Element Precursors for the Chemical Vapor Deposition of Electronic Materials Jason S. Matthews and William S. Rees Jr. 

GROUP 2 ELEMENT PRECURSORS FOR THE CHEMICAL VAPOR DEPOSITION OF ELECTRONIC MATERIALS... 

Chemical vapor deposition is a process that critically depends on the chemistry of molecular species and therefore provides an opportunity for chemists to make a major contribution to an important area of materials science. This is exacerbated in the case of deposition of Group 2 metal-containing films because it is particularly difficult to prepare molecular compounds of the heavier elements as precursors with all the appropriate characteristics. 

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