Oblique angle deposition

Liu Y-J, Zhang Z-Y, Dluhy RA, Zhao Y-P (2010) The SERS response of semiordered Ag nanorod arrays fabricated by template oblique angle deposition. J Raman Spectrosc. doi 10.1002/jrs.2567... 

Pyun, M. W., Kim, E. J., Yoo, D.-H., and S. H. Hahn. 2010. Oblique angle deposition of TiOj thin films prepared by electron-beam evaporation. Applied Surface Science 257 1149—1153. 

A combination of vapor deposition polymerization and oblique angle deposition has been used for the preparation of the nanofibers. 

DYNAMIC OBLIQUE ANGLE DEPOSITION OF NANOSTRUCTURES FOR ENERGY APPLICATIONS... 

Dynamic Oblique Angle Deposition of Nanostructures for Energy Applications... 

Oblique-angle deposition and physical shadowing effect... 

Figure 4. A schematic illustrates the effect of shadowing during oblique-angle deposition. Islands of different height are initially nucleated at the surface. Subsequently, the incident flux of material that strikes the surface with an oblique angle a is preferentially deposited onto the top of surface features that have larger height values.

The above biaxial Ge and CdTe semiconductor films were grown on oblique angle deposited CaF buffer layer on amorphous substrates. The biaxial CaF is an insulator and may not be suitable for devices that need electrical conduction. One may ask if it is possible to use a biaxial metal film as a buffer layer to grow epitaxial semiconductors for solar cell and display applications. Recently we developed a flipping rotation method in the dynamic oblique angle deposition technique. This flipping rotation method produces biaxial metallic films such as Mo and W on amorphous substrates This opens up another route to grow heteroepitaxial semiconductor films directly on metallic surfaces. 

Y. He, F. Junxue, Y. Zhao, Oblique angle deposition and its applications in plasmonics. Front. Phys. 9, 47-59 (2014)... 

J.D. Driskell, S. Shanmukh, Y. liu, S.B. Chaney, X.J. Tang, P. Zhao, R.A. Dluhy, The use of aligned silver nanorod arrays nepared by oblique angle deposition as surface enhanced Raman scattering substrates. J. Phys. Chem. C 112, 895 (2008)... 

The oblique angle deposition technique, together with a rotating substrate holder was used by Esfandiar et al. (2013) to make graded slanted chiral silver metal films. These researchers used scanning electron microscopy (SEM)... 

Recently, we have found that an Ag nanorod array substrate fabricated by a so-called oblique angle deposition (OAD) method can serve as an excellent SERS substrate [178-180]. This particular Ag nanorod structure is shown in Figure 5.14. 

Figure 5.14 (a) A schematic illustration of oblique angle deposition (b) Top and (c) cross-sectional scanning electron microscopy Images of the Ag nanorod array SERS substrates. 

NA = no data available in the literature NSL = nanosphere lithography OAD = oblique angle deposition. 

Driskell, ).D., Shanmukh, S., liu, Y.-J., Hennigan, S., (ones, L, Zhao, Y.-P., Dluhy, R.A., Krause, D.C. and Tripp, R.A. (2008) Infectious agent detection with SERS-active silver nanorod arrays prepared by oblique angle deposition. IEEE Sensors, 8, 863-70. 

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