Microlithographic

L. E. Thompson and M. J. Bowden, Introduction to Microlithograph, 2nd ed., American Chemical Society, Washington, D.C., 1994 H. Ito, S. Tagawa, and K. Horie, eds.. Polymeric Materials for Microelectronic Applications Science andTechnology, American Chemical Society, Washington, D.C., 1995. 

Imbihl, Kiskinova, Janek and coworkers67 have also used XPS and spatially-resolved photoelectron emission microscopy (SPEM) to investigate oxygen backspillover between YSZ and evaporated microstructured Pt films prepared using microlithographic techniques (Figure 5.38). 

There are other, nonhydrogel, new materials for chromatographic and electrophoretic separations [7,8,103,164,199,214,377,407], Eor example, Volkmuth and Austin [407] proposed electrophoretic studies in microlithographic arrays of posts and channels etched into sihcon wafers. This material may be useful for studying fundamental transport characteristics of macromolecules in defined media, and many recent studies have been conducted to develop chromatography and electrophoresis on silicon wafers with micron-scale channels... 

Other polymers containing Si in the main chain are the polysilanes. The discovery that polysilane derivatives were radiation sensitive(20), coupled with their stability in an oxygen plasma, has led to a number of microlithographic applications(14, 21-24). For the... 

In recent years, demands on microlithographic techniques have become much more severe along with the reduced sizes of semiconductor devices. Various techniques to enhance the performance of microlithographic resist systems have been developed. Contrast enhanced lithography (CEL) is one... 

Polysilanes. Following the first reports of soluble and processable polysilanes in the late 1970s, these macromolecules have attracted substantial interest from both fundamental and applied perspectives." The backbone of silicon atoms gives rise to unique electronic and optical properties as a result of the delocalisation of a-electrons. Several polysilanes have also been found to function as useful thermal precursors to silicon carbide fibres and these materials have also attracted attention with respect to microlithographic applications and as polymerisation initiators." ... 

Great activity has also been evidenced in microlithographically fabricated arrays of microelectrodes, which are typically formed in one plane on an insulating substrate [7,8,13,34-45] for experiments involving either an array of electrodes held at a common potential [37,40,42,43], or an array of noninteracting electrodes held at two or more different applied potentials [42,44], or an array of interdigitated electrodes held at two different potentials [13,34,36,38,39,45-47]. Arrays have significantly better analytical detection limits than continuous electrodes of the same overall dimensions, due to enhanced mass transport fluxes that arise from an increase in the spatial dimensionality of mass transport due to the alternation of electrode zones with pas-... 

Microlithographic All materials, positive Used to produce patterns, including arrays... 

Liao PF, Bergman JG, Chemla DS, Wokaun A, Melngailis J, Hawryluk AM, Economou NP. Surface-enhanced Raman scattering from microlithographic silver particle surfaces. Chemical Physics Letters 1981, 81, 355-359. 

Photolithography is the most commonly used microlithographic technique [2, 78]. In photolithography, a substrate, spin-coated with a thin layer of photo-... 

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