Microlithographic materials, importance

Photochemical surface reactions of polymer systems are an important field not only from the point of view of micro-electronic materials processing, but also from a more general scientific and materials application perspective. We have reviewed our studies in this field, which include investigations of excimer laser ablation, studies of the photo-oxidation of polymer surfaces, and the use of surface cross-linking and surface polymer depositions for microlithographic applications. With the increasing miniaturization of microelectronic devices, the fundamental and the applied aspects of surface photochemistry of polymers becomes increasingly important. 

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