Micro/nanolithography

Micro/Nanolithography Using Self-Assembled Monolayers (SAMs)... 

Jourrml of Micro/Nanolithography, MEMS, and MOEMS http //spie.org/x865.xml... 

Recently, reactive platforms based on well-defined macromolecules, such as dendrimers [75,150], have been introduced as reactive layers that expose chemically accessible functional groups in high densities. These approaches can be extended to micro- and nanoscale patterns by means of microcontact printing (ftCP) [86-89] and scanning probe lithography (AFM tip-assisted deposition, also called dip-pen nanolithography , DPN) [90], as reviewed below (Fig. 13). 

Another important field where inorganic nanotubes can be useful is as tips in scanning probe microscopy [24]. Here applications in the inspection of microelectronics circuitry have been demonstrated and potential applications in nanolithography are being contemplated. A comparison between a WS2 nanotube tip and a microfab-ricated Si tip indicates that while the micro-fabricated conical-shaped Si tip is unable to probe the bottom of deep and narrow... 

Synthesis of Stereoregular Polymers as Precursors to Highly Conducting Carbon for Use in Applications in Micro- and Nanolithography... 

Although many processes are available or have been proposed for fabricating polymer-based micro- and nanoanalytical devices, including microtransfer, microcontact print-ing, ° dip pen nanolithography, nanoimprint lithography, hot emboss-... 

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