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Magnetron configurations planar

Magnetron, planar A magnetron configuration where the target surface is a planar surface and the magnetic field is in a configuration such that it is round or oval. The sputter-erosion track resembles a Racetrack. [Pg.652]

Magnetron, rotatable cylindrical A planar-like magnetron configuration where the target... [Pg.652]

Figure 4-32. Co-planar configuration of the magnetron discharge. Only the negative glow plasma trapped in the magnetie field is normally visible in this configuration of magnetrons. Figure 4-32. Co-planar configuration of the magnetron discharge. Only the negative glow plasma trapped in the magnetie field is normally visible in this configuration of magnetrons.
Figure 7.6 Sputtering target configurations (clockwise) Planar DC diode, planar magnetron, S gun, hollow cylinder, spool, hemispherical, post, and rotating tubular magnetron... Figure 7.6 Sputtering target configurations (clockwise) Planar DC diode, planar magnetron, S gun, hollow cylinder, spool, hemispherical, post, and rotating tubular magnetron...
In some configurations, the sputtering target can provide specific vaporization geometries - e.g. fine source from an extended planar magnetron sputtering source. [Pg.277]

See other pages where Magnetron configurations planar is mentioned: [Pg.519]    [Pg.519]    [Pg.519]    [Pg.519]    [Pg.258]    [Pg.940]    [Pg.174]    [Pg.237]    [Pg.249]    [Pg.250]    [Pg.523]    [Pg.672]    [Pg.110]    [Pg.520]    [Pg.519]    [Pg.520]    [Pg.110]    [Pg.193]    [Pg.250]    [Pg.263]    [Pg.83]    [Pg.203]    [Pg.104]    [Pg.249]    [Pg.290]    [Pg.293]    [Pg.522]    [Pg.651]   
See also in sourсe #XX -- [ Pg.174 , Pg.249 ]



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Magnetron

Magnetron configurations

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