Lower thickness regimes

In addition, aspect ratio considerations, dependent on mechanical stability and pattern collapse propensity of resist lines, limit the thickness of resists designed for these technology nodes to ultrathin resist thickness regimes ( 100 nm and lower). However, the aspect ratio considerations must be balanced against the etch stability requirements that ensure successful pattern transfer to underlying substrates in a device. Both the aspect ratio and etch stability requirements must be balanced against the intrinsic resolution, particularly pitch resolution, of the resist in question. Hence, there is a trade-off between aspect ratio requirements and etch stability requirements on the one hand, and pitch resolution on the other. Therein lies the motivation for these advanced resist-processing schemes. 

However, for the lubricants with lower viscosity, e.g.. Polyglycol oil 1 and 2 with the kinetic viscosity of 47 mm /s to 145 mm /s in Table 1, the transition from EHL to TFL can be seen at the speed of 8 mm/sand23 mm/s, i.e., the relationship between film thickness and speed becomes much weaker than that in EHL. The transition regime can be explained when the film reduces to several times the thickness of the molecular size, the effect of solid surface forces on the action of molecules becomes so strong that the lubricant molecules become more ordered or solid like. The thickness of such a film is related to the lubricant viscosity or molecular size. 

Fig. 8 Only the viscosities Vj and V3 can influence the critical parameters significantly. The upper row depicts the dependence on a isotropic variation of the viscosity. In the middle and lower row we present the variation with v2 and V3 setting the other viscosities to v, = 0.1. Here the thick solid lines represent the minimal set of variables. For the full set of variables we have chosen four different values of X the solid curves with X = 0.7, the dashed curves with X = 1.3, the dotted curves with X = 2 and the dot-dashed curves with X = 3.5. Note the similarities between the curves for small (solid) and large X (dot-dashed) in the upper and middle row. In these regimes v2 is the dominating viscosity...

Figure 2. Calculated point-contact spectra for n- and a-bands (upper and lower panels, respectively) of MgE>2 [12] for ballistic (dashed curve), diffusive (thick solid curve) and tunnel (dotted curve) regimes of current flow. Real and imaginary parts of A (e) are taken from Fig. (1).

---