Line width resolution

The key factors driving the advancements in exposure tool technology are line width resolution, registration, and depth of focus. The ahdity to decrease device feature line width is heneficial in that it lowers cost, increases the number of dies produced per wafer, and also increases device speed. Registration helps to increase device yield and speed by accurately overlaying one layer on another. Depth of focus control helps to determine CD control and consequently device speed and yield. ... 

The effect of the screen printing line resolution was assessed by painting a test piattern design as seen in Fig. 3. The unfired and fired samples were then measured for the line width resolution using an optical microscope OLYMPUS MX40. The line resolution is observed for the horizontal and vertical line. 

Effects of weight percentage thinner on the line width resolution... 

High-resolution spectroscopy used to observe hyperfme structure in the spectra of atoms or rotational stnicture in electronic spectra of gaseous molecules connnonly must contend with the widths of the spectral lines and how that compares with the separations between lines. Tln-ee contributions to the linewidth will be mentioned here tlie natural line width due to tlie finite lifetime of the excited state, collisional broadening of lines, and the Doppler effect. 

Until the advent of lasers the most intense monochromatic sources available were atomic emission sources from which an intense, discrete line in the visible or near-ultraviolet region was isolated by optical filtering if necessary. The most often used source of this kind was the mercury discharge lamp operating at the vapour pressure of mercury. Three of the most intense lines are at 253.7 nm (near-ultraviolet), 404.7 nm and 435.7 nm (both in the visible region). Although the line width is typically small the narrowest has a width of about 0.2 cm, which places a limit on the resolution which can be achieved. 

Because the line width is much less than the resolution this ratio is not reflected in the peak heights in Figure 6.8. 

A monochromator is useful not only for removing unwanted lines from the X-ray source but also for narrowing the otherwise broad lines. For example, each of the MgXa and AlXa doublets is unresolved and about 1 cY wide at half-intensity. A monochromator can reduce this to about 0.2 cY This reduction of the line width is very important because in an XPS specttum, unlike an ultraviolet photoelectron specttum, the resolution is limited by the line width of the ionizing radiation. Unfortunately, even after line narrowing to 0.2 cY... 

Laser radiation is very much more intense, and the line width much smaller, than that from, for example, a mercury arc, which was commonly used as a Raman source before 1960. As a result, weaker Raman scattering can now be observed and higher resolution is obtainable. 

In a skimmed supersonic jet, the parallel nature of the resulting beam opens up the possibility of observing spectra with sub-Doppler resolution in which the line width due to Doppler broadening (see Section 2.3.4) is reduced. This is achieved by observing the specttum in a direction perpendicular to that of the beam. The molecules in the beam have zero velocity in the direction of observation and the Doppler broadening is reduced substantially. Fluorescence excitation spectra can be obtained with sub-Doppler rotational line widths by directing the laser perpendicular to the beam. The Doppler broadening is not removed completely because both the laser beam and the supersonic beam are not quite parallel. 

In order to observe such high-resolution fluorescence excifafion spectra, the laser must have a very small line width. To achieve this a ring dye laser, a modification of the dye laser described in Section 9.2.10, is used a line width as small as 0.5 MFIz (1.5 x 10 cm ) can be obtained. 

In principle all the X-ray emission methods can give chemical state information from small shifts and line shape changes (cf, XPS and AES in Chapter 5). Though done for molecular studies to derive electronic structure information, this type of work is rarely done for materials analysis. The reasons are the instrumental resolution of commercial systems is not adequate and the emission lines routinely used for elemental analysis are often not those most useftil for chemical shift meas-ure-ments. The latter generally involve shallower levels (narrower natural line widths), meaning longer wavelength (softer) X-ray emission. 

The width and shape of the energy loss peaks in HREELS are usually completely determined by the relatively poor instrumental resolution. This means that no information can be obtained from HREELS about such interesting chemical physics questions as vibrational energy transfer, since the influence of the time scale and mechanism of vibrational excitations at surfaces on the lifetimes, and therefore the line widths and shapes, is swamped. (Adsorbates on surfaces have intrinsic vibra-... 

K, to optimize the energy resolution by reducing the contribution of thermal broadening to the line-width, and lead is, of course, superconducting at that temperature. 

There are several considerations that go into selecting an X-ray line to excite XPS spectra. Included are the energy of the X-rays and the width of the line. If the energy is too low, the number of photoelectron lines that will be excited will be too small for general use. If the line width is too large, the resolution in the XPS spectrum will also be too small. Therefore, it is useful to consider the processes involved in X-ray generation. 

We have studied the temporal dynamics of CPG in m-LPPP by performing field-assisted pump-probe experiments on LED structures, as described in Section 8.3.2. The narrow line-width PA assigned to polarons (see Section 8.5.2) is a fingerprint of charge generation in m-LPPP. Monitoring the dynamics of these PA band enables us, for the first time, to directly observe the CPG dynamics in a conjugated polymer with sub-picosecond time resolution [40],... 

The system provides a resolution of approximately 0.02 nm, comparable with emission line width. 

The resolution of a monochromator is the smallest frequency interval the instrument can separate. The limiting resolution is the bandwidth measured at half height when scanning across an infinitely narrow intense source 22). As already mentioned, the broader excitation line width of Ar+ lasers (0.15 to 0.25 cm-1) compared to that of the He-Ne lasers (0.05 cm-1) means a lower resolution limit when the Ar+ laser is used as a Raman source. 

The best resolution of Q-branch rotational structure in a N2-Ar mixture was achieved by means of coherent anti-Stokes/Stokes Raman spectroscopy (CARS/CSRS) at very low pressures and temperatures (Fig. 0.4). A few components of such spectra obtained in [227] are shown in Fig. 5.9. A composition of well-resolved Lorentzian lines was compared in [227] with theoretical description of the spectrum based on the secular simplification. The line widths (5.55) are presented as... 

Figure 1.29 The effect of increased digital resolution (DR) on the appearance of the NMR spectrum, (a) The spectrum of odichlorobenzene recorded at a digital resolution of 0.1 Hz per point, allowing the sj>ectral lines to be seen at their natural line width, (b) The spectrum of the same molecule recorded at a digital resolution of 0.4 Hz per point.

The effective resolution is determined by the number of data points in each domain, which in turn determines the length of t and <2- Thus, though digital resolution can be improved by zero-filling (Bartholdi and Ernst, 1973), the basic resolution, which determines the separation of close-lying multiplets and line widths of individual signals, vdll not be altered by zero-filling. 

The emission spectmm of Co, as recorded with an ideal detector with energy-independent efficiency and constant resolution (line width), is shown in Fig. 3.6b. In addition to the expected three y-lines of Fe at 14.4, 122, and 136 keV, there is also a strong X-ray line at 6.4 keV. This is due to an after-effect of K-capture, arising from electron-hole recombination in the K-shell of the atom. The spontaneous transition of an L-electron filling up the hole in the K-shell yields Fe-X X-radiation. However, in a practical Mossbauer experiment, this and other soft X-rays rarely reach the y-detector because of the strong mass absorption in the Mossbauer sample. On the other hand, the sample itself may also emit substantial X-ray fluorescence (XRF) radiation, resulting from photo absorption of y-rays (not shown here). Another X-ray line is expected to appear in the y-spectrum due to XRF of the carrier material of the source. For rhodium metal, which is commonly used as the source matrix for Co, the corresponding line is found at 22 keV. 

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