Hybridization physical vapor deposition

Increased control of film composition, structure and size can be achieved by limiting the rate of reaction. This is possible using gas phase deposition where the amount of reactant is relatively low. Gas phase deposition loosely covers any hybridization strategy where at least one of the hybrid components is in the gas phase. This includes chemical vapor deposition (CVD), physical vapor deposition (PVD) and atomic layer deposition (ALD) as well as various plasma, sputtering and evaporation processes. 

Several methods for the incorporation of catalysts into microreactors exist, which differ in the phase-contacting principle. The easiest way is to fill in the catalyst and create a packed-bed microreactor. If catalytic bed or catalytic wall microreactors are used, several techniques for catalyst deposition are possible. These techniques are divided into the following parts. For catalysts based on oxide supports, pretreatment of the substrate by anodic or thermal oxidation [93, 94] and chemical treatment is necessary. Subsequently, coating methods based on a Uquid phase such as a suspension, sol-gel [95], hybrid techniques between suspension and sol-gel [96], impregnation and electrochemical deposition methods can be used for catalyst deposition [97], in addition to chemical or physical vapor deposition [98] and flame spray deposition techniques [99]. A further method is the synthesis of zeoUtes on microstructures [100, 101]. Catalysts based on a carbon support can be deposited either on ceramic or on metallic surfaces, whereas carbon supports on metals have been little investigated so far [102]. 

Nano Hybrid Shish Kebabs Formed by Solvent Evaporation and Physical Vapor Deposition... 

In Part Two, Chapter 4 describes a general fabrication-characterization route of electrospinning PLA poly(s-caprolactone) (PCL)/HNT composite fibers. The effects of HNTs with or without the modifier 3-aminopropyltriethoxysilane on fiber diameter, morphological structure, thermal properties, crystalline stmctures, and degree of crys-talhnity, as well as the intermolecular interaction of electrospun nanocomposite fibers, are thoroughly studied to provide the appropriate guidance to the controlled drug release associated with fibrous structures. Chapter 5 deals with the synthesis and characterization of CNT hybrid fillers via chemical vapor deposition (CVD) technique for polymer nanocomposites. Optimized synthesis parameters are presented and comparative studies are also conducted between chemical hybrid-filled and physical hybrid-fiUed polymer nanocomposites in terms of their typical applications. 

The deposition of films from a liquid phase whose precursor solution has been synthesized via sol-gel chemistry has widely been applied to produce coatings of different compositions and structures, such as oxides, hybrids, nanocomposites, and mesoporous coatings. Chemical-physical methods, such as plasma-enhanced chemical vapor deposition (PECVD) or chemical vapor deposition (CVD), are still fevored for most of the industrial applications. The sol-gel route to films, however, even if has not been able to challenge these techniques in terms of mass production, has occupied an important niche in the field. 

A.V. Pogrebnyakov, J.M. Redwing, J.E. Jones, X.X. Xi, S.Y. Xu, Q. li, V. Vaithyanathan, D.G. Schlom, Thickness dependence of the properties of epitaxial MgB2 thin films grown by hybrid physical-chemical vapor deposition. Appl. Phys. Lett. 82(24), 4319-4321 (2003)... 

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