High-performance integrated circuits

Interconnection and Packaging of High-Performance Integrated Circuits... 

Cocchini P (2002) Concurrent flip-flop and repeater insertion for high performance integrated circuits. ICCAD 2002 268-273... 

The analysis of tetramethylammonium hydroxide (TMAH) solutions manufactured by SACHEM Inc. of Cleburne, Texas, includes the determination of trace elements. These elements cause less-than-optimum performance of integrated circuit boards manufactured by SACHEM s customers that use these solutions in their processes. Alkali and alkaline earth metals (e.g., Li, Na, K, Mg, Ca, and Ba) can reduce the oxide breakdown voltage of the devices. In addition, transition and heavy metal elements (e.g., Ti, Cr, Mn, Fe, Co, Ni, Cu, Zn, Ag, Au, and Pb) can produce higher dark current. Doping elements (e.g., B, Al, Si, P, As, and Sn) can alter the operating characteristics of the devices. In SACHEM s quality control laboratory, ICP coupled to mass spectrometry is used to simultaneously analyze multiple trace elements in one sample in just 1 to 4 min. This ICP-MS instrument is a state-of-the-art instrument that can provide high throughput and low detection Emits at the parts per thousand level. Trace elemental determination at the parts per thousand level must be performed in a clean room so that trace elemental contamination from airborne particles can be minimized. 

SACHEM Inc., located in Cleburne, Texas, is a producer of high-purity bulk chemicals for companies that have high-purity requirements in their chemical processing. As stated in Workplace Scene 1.2, one of their products is tetramethylammonium hydroxide (TMAH), which is sold to semiconductor industries. The analysis of TMAH for trace anions such as chloride, nitrate, nitrite, and carbonate is critical for SACHEM s quality control laboratory. If these ions are present on the integrated circuit boards manufactured by one of their semiconductor customers, they may cause corrosion severe enough to affect the functionality and performance of the electronic devices in which the circuit boards are used. In SACHEM s quality control laboratory, ion chromatography procedures have been developed to measure the anion concentrations in TMAH. Because the concentration levels are trace levels, a clean room environment, like that described in Workplace Scene 1.2, is used. A special procedure for carbonate analysis is required so that the absorption of carbon dioxide from the atmosphere can be minimized. 

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