Gold thin-film deposition

Uchida, H., Saito, N., Sato, M., Take, M. and Ogi, K. (1994) (Mitsubishi Material Corp) Manufacture of gold thin film by chemical vapor deposition, Jpn. Kokai Tokkyo Koho JP 06,101,046. 

An Emitech sputter coater model K550 is used to deposit the gold thin film working electrode. 

Revzin A, Sirkar K, Pishko M. Glucose, lactate, and pyruvate biosensor arrays based on redox polymer/oxidoreductase nanocomposite thin films deposited on photo-lithographically patterned gold electrodes. Sensors and Actuators B 2002, 81, 359-368. 

Gold thin films are of interest as substrates for a variety of applications, and also for metallic contacts. Reports of gold film depositions from metal-organic precursors are limited. Precursors have included Au(hfac)Mc2, Au(acac)Mc2, AuMe(PMc3), AuMe(PEt3), AuMe(P(OMe)2Me), and Au(02CRf)(PR3) (Rf = perfluoroalkyl, R = alkyl, aryl). ... 

We present in Fig. 2 the SEM micrographs for Sucrose powder (sample S) and Sucrose thin film deposited on glass (sample SI). In order to record a SEM image the Sucrose powder was deposited on a double adhesive carbon band and afterwards was deposited a fine layer of gold (the sample S becomes conductive). We remark on sample S a disordered aspect with scratches and valleys on a uniform background specific for non-crystalline samples. For the Sucrose thin film (sample SI with a thickness of 190 nm) we remark an ordered aspect of droplets in a uniform matrix. 

An early resistive hydrogen sensor, developed at Bendix Corporation [32], consisted of two palladium thin films deposited on a glass slide, with gold or silver contacts at their ends. Each strip, 8 mm long and 0.5 mm wide. 

Physically, the adhesion of a thin metallic film on the substrate may not be strong, but the adhesion can be enhanced using an intermediate metallic film. For instance, the deposition of a platinum or gold thin film on a silicon substrate is often accomplished by first depositing a thin layer of titanium or chromium. The titanium or chromium film enhances the adhesion of the platinum or gold film onto the substrate. However, electrochemically, these titanium or chromium layers may participate in sensing element reactions. This may yield unexpected results, and careful examination of the electrode reaction(s) and experimental results is needed. 

Copper phthalocyanine (CuPc) thin films deposited at room temperature (30°C) on quartz and post-annealed gold-coated quartz substrates were examined using FESEM [4]. Such structures can be used for the development of photoconductive or catalytic devices. FESEM images showed daisely packed nanoparticles and nanoflower-like structures on the annealed gold-coated quartz substrates. The further characterization by fiactal dimension of the assanbly of nanostructures in the films, estimated from FESEM images, agreed with optical measurranents and indicated significant effect and potential control of the electronic and optical propalies of these films. 

AFM images of gold thin films, (a) As-deposited and subjected to electric fields of (b) 0.4kV/cm and (c) 0.66kV/cm. 

Feng SW, Nainaparampil JJ, Tabet MF, Urban FK (1994) Gold and zinc thin films deposited by the ionized cluster beam technique. Thin Solid Films 253 402-406... 

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