Gauge electronic pressure transducer

G. Bourdon Gauges. As an alternative to mercury manometers there is a variety of gauges based on mechanical or electrical pressure transducers. This section presents a description of purely mechanical gauges which still find use in this electronic age.4 The metal Bourdon gauge (Fig. 7.5) is fashioned around a semicircular thin-walled metal tube with mechanical linkage to a pointer. Fused-quartz spiral gauges are also available. In this case, a thin spiral is sensitive to a pressure differential, and the deflection is balanced with air pressure in the surrounding envelope. The air pressure is then measured with a manometer. 

Electronic manometers provide a convenient method of pressure measurement in a tensimeter, and the general arrangement may be very simple (Fig. 9.3). The one problem which must be anticipated is long-term zero pressure drift, which can be encountered with an electronic pressure gauge. Drift is minimized by maintaining a constant temperature on the pressure transducer and by avoiding mechanical vibration at the transducer. 

The measurement of pg requires a pressure transducer system that is not influenced by the electric power used for the plasma polymerization, particularly when a high-frequency radio frequeny power is employed. Some pressure transducers that give pressure readouts independent of the nature of a gas are ideally suited for plasma polymerization. Some electronic gauges the readout of which depends on the nature of the gas (e.g., thermal conductivity) do not provide accurate readings of Pg because in most cases the composition the gas mixture in the LCVD reactor is unknown and there is no way to calibrate the meter for an unknown gas mixture. 

Besides the strain gauge type transducer, other pressure transducers may employ variable capacitance, variable inductance, or piezoelectric crystal sensors to detect pressure changes. The low level output pressure transducer can be used in systems controlling flammable and other hazardous gases if the system has been designed such that the electronic power levels being used to excite the transducer remain very low. They can even be used in Class I, Division II areas if the proper intrinsic safety barriers are used in conjunction. Like the pressure gauge, the transducer may have a... 

Modem differential pressure cells E-type electronic transducers, strain gauges, capacitive cell transducers, and most recently digital electronics have replaced the pneumatic-type DP cell. Figure 2.6 shows a schematic of an electronic DP cell. 

Figure 7.5 Pirani heat conductivity pressure gauge (cross sectional view of measurement cell). (A) Pirani transducer (sensor integrated with supply and interface electronics). (B) sensor housing with flange. (C) electronic housing. (D) PC-board (supply and interface).

---