Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

SEMI S2-0200 is titled Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. It applies principally to suppliers and what they are to do with respect to hazards and risks in the design and manufacturing process. 

SEMI S2-0706. Environmental, Health, and Safety Guidehne for Semiconductor Manufacturing Equipment. San Jose, CA Semiconductor Equipment and Materials International, 2006. Related Information 1 —Equipment/Product Safety Program is an adjunct to these Guidelines.)... 

Other important guidelines for evaluating the acceptability of semiconductor processing equipment are issued by Semiconductor Equipment and Materials International (SEMI). SEMI S2-93-A, Product Safety Guidelines, is intended as a minimum set-of-performance based environmental health and safety requirements for equipment utilized in semiconductor manufacturing. ] These guidelines define minimum safety considerations manufacturers should adhere to when they sell process equipment. Some of the items included in S2-93-A are ... 

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