Electrochemical planarization

Hong Y, Roy D, Babu SV. Ammonium dodecyl sulphate surfactant for as a potential corrosion inhibitor for electrochemical planarization of copper. Electrochem Solid State Lett 2005 8(11) G297-G300. 

Electrochemical polishing, or electropolishing, is conventionally used for producing shiny surfaces where mechanical polishing is difficult to perform. Examples include components with complicated surfaces, decorative items, and other special applications. For microelectronic fabrication, planarization is emphasized in addition to surface smoothness. Hence, the term electrochemical planarization (ECP) is used throughout this chapter/book. 

Anodic Polarization Curve and Conditions for Electrochemical Planarization... 

Anodic layers are proved to be the key for electrochemical planarization, which can be achieved under mass transport controlled conditions. 

Huo J. Electrochemical planarization of copper for microelectronic applications.. Doctoral dissertation. Oregon Oregon Health and Science University 2004. 

Huo J, Solanki R, McAndrew J. Electrochemical planarization of patterned copper films for microelectronic applications. J Mater Eng Perform 2004 134 413-420. 

Contolini RJ, Bernhardt AF, Mayer ST. Electrochemical planarization for multilevel metallization. J Electrochem Soc 1994 141 2503-2510. 

Contolini RJ, Mayers ST, Graff RT, Tarte L, Bernhardt AF. Electrochemical planarization of ULSI copper. Solid State Technol 1997 10 155-161. 

FIGURE 4.18 Basic process of Cu electrochemical planarization technology. 

We can understand the differences in properties between the carbon allotropes by comparing their structures. Graphite consists of planar sheets of sp2 hybridized carbon atoms in a hexagonal network (Fig. 14.29). Electrons are free to move from one carbon atom to another through a delocalized Tr-network formed by the overlap of unhybridized p-orbitals on each carbon atom. This network spreads across the entire plane. Because of the electron delocalization, graphite is a black, lustrous, electrically conducting solid indeed, graphite is used as an electrical conductor in industry and as electrodes in electrochemical cells and batteries. Its... 

Warnock, J., A Two-Dimensional Process Model for Chemo-mechanical Polishing Planarization," J. Electrochem. Soc., Vol. 138,1991,pp. 2398-2402. 

Warnock, A Two-Dimensional Process Model for Chemime-chanical Polish Planarization," Journal of the Electrochemical Society,"Vol. 138,No.8,1991,pp.2398-2402. 

Sundararajan, S. andXhakurta, D., Two-Dimensional Wafer-Scale Chemical-Mechanical Planarization Models Based on Lubrication Theory and Mass Transport, Journal of the Electrochemical Society, Vol. 146, No. 2, 1999, pp. 761-766. 

The persistent radical anion II was obtained by chemical or electrochemical reduction of the parent neutral compound. The EPR spectrum of II is composed of a triplet of triplet (ap(2P)=3.50 mT and ap(2P)=0.89 mT) characteristic of a planar conjugated structure (Fig. 9) [87]. Amazingly, the dianion III was found to be paramagnetic exhibiting an EPR spectrum composed of a distorted dou-... 

Electrochemical template-controlled sjmthesis of metallic nanoparticles consists of two steps (i) preparation of template and (ii) electrochemical reduction of metals. The template is prepared as a nano structured insulating mono-layer with homogeneously distributed planar molecules. This is a crucial step in the whole technology. The insulating monolayer has to possess perfect insulating properties while the template has to provide electron transfer between electrode and solution. Probably, the mixed nano-structured monolayer consisting of alkylthiol with cavities which are stabilized by the spreader-bar approach [19] is the only known system which meets these requirements. 

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