Elastic Recoil Detection Analysis sensitivity

Forward recoil spectrometry (FRS) [33], also known as elastic recoil detection analysis (ERDA), is fiindamentally the same as RBS with the incident ion hitting the nucleus of one of the atoms in the sample in an elastic collision. In this case, however, the recoiling nucleus is detected, not the scattered incident ion. RBS and FRS are near-perfect complementary teclmiques, with RBS sensitive to high-Z elements, especially in the presence of low-Z elements. In contrast, FRS is sensitive to light elements and is used routinely in the detection of Ft at sensitivities not attainable with other techniques [M]- As the teclmique is also based on an incoming ion that is slowed down on its inward path and an outgoing nucleus that is slowed down in a similar fashion, depth infonuation is obtained for the elements detected. 

Heavy ion elastic recoil detection analysis (HI-ERDA) is a universal analytical probe capable of detecting virtually all elements simultaneously and with almost constant detection sensitivity. High energies of different ions are... 

The most commonly used accelerator-based techniques for depth profiling are Rutherford Backscattering (RBS) which will be discussed in Chap. 2, Elastic Recoil Detection (ERD) which will be discussed in Chap. 3, and Nuclear Reaction Analysis (NRA) which will be discussed in Chap. 7. PIXE analysis has the advantage of a very good sensitivity and possible simultaneous detection of all heavier elements. 

The most common mode of chemical analysis presented herein has been the monitoring of elastically/inelastically scattered or recoiled incident beam species, or the analysis of a secondary emission pattern. In addition to the release of characteristic X-rays, Auger electrons, and photoelectrons, an incident beam may cause ionization of the sample. This technique is known as secondary-ion mass spectrometry (SIMS), which represents the most sensitive surface characterization technique developed to date, with detection limits of atoms cm ... 

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