Discharge-produced plasma sources

Discharge-produced plasma (DPP) sources employ extremely high electrical voltages to ionize and discharge fuel materials such as xenon gas or tin confined within an electrode assembly, resulting in the creation of plasmas comprising 

Due to their directional pattern of radiation, DPP sources can afford smaller collection angles than their laser-produced counterparts, which radiate in an almost isotropic manner. This explains the use of grazing incidence optics as the collector for DPP sources. Also, DPP sources generate additional debris from the eroded electrodes, which are absent in LLP sources. The conversion efficiency (electricity to EUV radiation) of DPP sources is 1.5% (into 2tt sr), with transmission to intermediate focus of about 6%. 

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The two main sources used in commercial EUV lithographic exposure tools comprise laser-produced plasma sources and discharge-produced plasma sources. ... 

Atoms may be produced both in thermal and supersonic beams using the techniques of thermal dissociation [33] and dissociation by micro-wave [34] and radio frequency [35] discharges and by plasma sources [36]. Comparatively few reactions involving radicals have been studied in molecular beams, but sources have been developed that produce radicals by pyrolysis [37], reaction [25, 38, 39] and photolysis [40]. 

Atoms may be produced both in thermal and supersonic beams using the techniques of thermal dissociation [33] and dissociation by micro-wave [34] and radio frequency [35] discharges and by plasma sources... 

Plasma sources are capable of producing intense emission from the elements. Types of plasma used in chromatographic detection are microwave induced plasmas (MIP) and inductively coupled plasma (ICP). An argon plasma is sustained in a microwave cavity which focuses into a capillary discharge cell. The most widely used cavities are cyhndrical resonance cavities and surfatron that operates by surface microwave propagation along a plasma column. Atmospheric pressure cavities are very simple to interface with capillary GC columns. 

A feature common to all these DC plasma sources is the DC arc discharge. The discharge is stabilized in various ways or transferred away from the arc column to produce a flame-like appearance (plasmajet). DC plasmas are divided into two groups (i) current carrying DC plasmas, and (ii) current free DC plasmas or plasmajets. 

Bombardment of C60 with nitrogen ions from a plasma discharge source or sublimation of C60 in a nitrogen glow discharge produces a mixture of neutral N C6q and empty The presence of N C6o can be... 

A novel ionization source, DART has been developed with the goal of replacing radioactive sources in IMS systems such as the CAM (chemical agent monitor). The DART ionization source, shown in Figure 3.14, consists of a discharge chamber containing a cathode and anode this produces plasmas containing ions, electrons,... 

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