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Discharge-produced plasma

The two main sources used in commercial EUV lithographic exposure tools comprise laser-produced plasma sources and discharge-produced plasma sources. ... [Pg.716]

Discharge-produced plasma (DPP) sources employ extremely high electrical voltages to ionize and discharge fuel materials such as xenon gas or tin confined within an electrode assembly, resulting in the creation of plasmas comprising... [Pg.718]

By use of a piezoelectric device, as in a gas lighter, a small spark containing electrons and ions can be produced. If the spark is introduced into the gas in a discharge tube, it will provide the extra initial electrons and ions needed to start a continuous discharge. A plasma torch is frequently lit (started) in this fashion. [Pg.40]

The engine should then be rotated manually, water injected and spark plug fired using the discharge capacitor to produce plasma ignition. The piston should move at least a small amount... [Pg.26]

Fig. 5 A typical glow discharge produced upon applying a high voltage in a plasma reactor containing nitrogen gas... Fig. 5 A typical glow discharge produced upon applying a high voltage in a plasma reactor containing nitrogen gas...
Several reports on the activation of lignocellulosic surface by corona discharge, microwave plasma, and ozone treatments have been published (120-22). Strong bonds were produced between thermoplastics and wood by corona treatment of wood surfaces and particularly by treatment of polyethylene and polystyrene surfaces. With 5-min treatment wood—polymer—wood bonds of over 569 psi... [Pg.371]

See other pages where Discharge-produced plasma is mentioned: [Pg.718]    [Pg.889]    [Pg.234]    [Pg.699]    [Pg.186]    [Pg.718]    [Pg.889]    [Pg.234]    [Pg.699]    [Pg.186]    [Pg.2803]    [Pg.423]    [Pg.773]    [Pg.493]    [Pg.67]    [Pg.236]    [Pg.246]    [Pg.34]    [Pg.342]    [Pg.120]    [Pg.44]    [Pg.252]    [Pg.429]    [Pg.142]    [Pg.238]    [Pg.388]    [Pg.536]    [Pg.48]    [Pg.244]    [Pg.244]    [Pg.117]    [Pg.416]    [Pg.448]    [Pg.128]    [Pg.3041]    [Pg.703]    [Pg.227]    [Pg.191]    [Pg.164]    [Pg.165]    [Pg.395]    [Pg.398]    [Pg.399]    [Pg.43]    [Pg.449]    [Pg.262]    [Pg.2803]   


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Discharge-produced plasma sources

Plasma discharge

Plasma-produced

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