Detectors electrostatic devices

The temperature of solid specimens in the plasma was determined by means of an infrared radiation thermometer (Infrascope Model 3-1C00, Huggins Laboratories Inc., Sunnyvale, Calif.) attached to a chart recorder. This device employs a lead sulfide detector and suitable filters to permit remote measurement of 1.2 to 2.5/x radiation emitted by the specimen. Line filters and electrostatic shielding were employed to minimize interaction of the radiofrequency field with the infrared thermometer. To compensate for variations in emissivity and inhomogeneity in the optical field, empirical calibration curves were constructed based on measurements of new and partially oxidized graphite pellets in a con-... 

Figure 17.3.5 Schematic diagram of X-ray photoelectron spectrometer with an electrostatic hemispherical analyzer. The detector is usually a channel electron multipher. [From J. J. Pireaux and R. Sporken in M. Grasserbauer and H. W. Werner, Eds., Analysis of Microelectronic Materials and Devices, Wiley, New York, 1991, with permission.]...

The basic principles of thermal ionization mass spectrometry (TIMS) operation were described in Chapter 1 a drop of the liquid sample is deposited on a filament, a low electric current heats the filament, and the solution is evaporated to dryness. The filament current (temperature) is then raised and atoms of the sample are emitted and ionized (either by the same filament or by a second electron emitting filament). The ions are accelerated by an electric field, pass through an electrostatic analyzer (ESA) that focuses the ion beam before it enters a magnetic field that deflects the ions into a curved pathway (in some devices, the ions enter the magnetic field before the ESA—referred to as reverse geometry). Heavy and light ions are deflected by the field at different curvatures that depend on their mass-to-charge ratio. A detector at the end of the ion path measures the ion current (or counts the ion pulses). There are many variations of ion sources, ion separation devices, and detectors that are used in TIMS instruments and specifically adapted for ultratrace or particle analysis. 

Bulk wave devices are commonly used as deposited mass or film thickness monitors in vacuum deposition systems. Their use in this context has been described by Czanderna (5) and is the subject of a continuing series of monographs (39). Bulk wave mass detectors have also been applied to the detection and quantitation of aerosols and suspended particles. Surface deposition was achieved by the use of a surface adhesive (40), electrostatic precipitation (41), or inertial impact (42). The mass sensitivity of bulk wave devices appears more than adequate for these applications, and there are no reports in the literature of the development of simple SAW device mass sensors which potentially could yield higher mass sensitivities. 

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