Depth resolution definition

Fig. 9.17. In-depth profiles obtained by LIBS and definition of in-depth resolution (DR).

Figure 8.21 Definition of depth resolution and its effect on depth profiling. (Reproduced with permission from J.C. Vickerman, Surface Analysis The Principal Techniques, John Wiley Sons Ltd, Chichester. 1997 John Wiley Sons Ltd.)...

Positron annihilation lifetime spectroscopy (PALS) allows the quantitative investigation of the polymer free volume [1, 2]. Additionally, the PALS beam technique makes a direct depth resolution possible, by implanting the probe - the positron - within a definite sample depth interval depending on the positron kinetic energy [3]. It is one of the very few nondestructive techniques for investi-... 

Iron within a definite sample depth interval. The average implantation depth d depends nonlinearly (d on the positron energy E. The depth resolution is approximately half of the average implantation depth [3]. 

Depth resolution is most commonly defined as the depth over which a signal from some abruptly appearing layer climbs from 16% of its maximum intensity to 84% when plotted on a hnear scale as this represents two standard deviations ( lGaussian function with a step function. This is illustrated in Figure 5.5. This definition is also applied to decaying signals from abruptly terminated layers. Caution must, however, be exercised when matrix effects and/or radiation-enhanced segregation are active, as these can modify the value derived relative to the absolute sputter-induced depth resolution. 

Resolution the ratio m/Sm where m and m + Sm are the relative masses of the two ions that yield neighbouring peaks with a valley depth x % of the weakest peak s intensity. In the commercial description of mass spectrometers, x = 50 is normally used. However, 10 % valley has been largely used in the past. Another definition entails using for Sm the width of an isolated peak at x % of its maximum. 

While commercial Raman spectrometers collect the scattered light from a laser spot of size 1 pm at best and the Raman spectra also include information of sample regions above and below the focal plane, the implementation of confocal microscopy can improve the optical resolution and the depth of sharpness. The method leads to better image definition. Confocal microscopy means point illumination and that a small aperture is placed in the optical path so that only the scattered light located in a thin focus plane can reach the detector. The aperture-dependent spatial... 

Shrinking transistor size demands pattern definition tools that can print increasingly smaller features. However, increasing resolution for smaller features is obtained at the expense of the depth of focus. Depth of focus is the vertical range over which the image will be in acceptable focus (i.e., the image will adequately print). If the mask feature cannot be adequately imaged on... 

INPUT surveys yield depth penetration of up to a few hundred metres for large, good conductors. At the same time they give good definition of conductor shape, depth and conductivity, and good resolution to distinguish between adjacent conductors. 

In spatially resolved microanalysis, measurements are obtained for many small neighbouring locations, and spatial and gradient relationships can be determined. The essence of microanalysis is the achievement of good spatial resolution. For the surface sensitive electron spectroscopies this includes both lateral resolution on the sample surface and resolution in depth. Because of the small amount of material available, some of the accuracy and precision is given up for obtaining better spatial definition. 

Resolution. Two bands are considered resolved when both may be consistently measured with an absorption-peak-to-valley depth that exceeds the peak-to-peak noise level—i.e., each band will be distinguishable from noise peaks. Under this definition a side band that appears as a shoulder on another band is not considered resolved. 

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