Depth of damage

Another application areas of microtomography are biology and agriculture. Fig.4a shows an X-ray transmission image through the tulip bulb in wet conditions. Damaged area can be found in the surface of this bulb. Fig.4b shows the reconstructed cross section with information about depth of damaged volume. 

Operation Depth of Damage Flatness of Processed Wafer Relative Speed of Process Ease of Automation... 

Ion irradiation of PTFE and plasma-fluorinated PMDA-ODA has been performed under typical conditions of RBS analysis. Loss of fluorine is observed on all films, especially at the start of irradiation. Decomposition is introduced by the beam interaction with the polymer defluorination and formation of carbon-carbon double bonds are detected by XPS and FTIR. For PTFE, irradiation produced films which were brittle and blistered. The calculated stopping power for He2+ ions and the experimentally measured depth of damage are approximately the same. 

The rocking-curve method has been applied to semiconductor materials by several workers. Weissmann(8) estimated 5ft as the depth of damage on germanium lapped with No. 305 abrasive (3200 mesh alundum, having nominal particle size of 5fi). On silicon Andrus and Bond (9) found l/2ft depth for a fine polish, 3ft for No. 305 lap, and 10ft for a diamond saw-cut the widths at half-maximum intensity before any etching were 13<... 

Camp (11) determined depths of damage of 7, 5, and 3/a on (100), (111), and (110) faces of germanium lapped with No. 305 abrasive, and discussed the shapes of the curves for different faces in terras of the relative etching rates on different faces. 

Faust (1.3) used die etching rate method on both german-ium and silicon and covered a wide range of abrasive particle sizes. Some of his data are shown in Fig. 5 (14), He found that for a given abrasive treatment the depth of damage on silicon was about one fourth that on germanium. 

Fig. 5. Depth of damage on germanium and silicon as a function of abrasive particle size. O Etching rate method (14). Data from references 11 and lb After Faust...

T. M. BUCK This is certainly another possible explanation. The method of abrasion affects the depth of damage as I showed in Table I thus it is important to point out the use of steel dates. One might expect that machine grinding with steel plates could produce relatively high temperatures by local heating as discussed by Bowden and Tabor [The Friction and... 

Figure 8.4 Static SIMS. Primary ion bombardment results in surface damage and emission of ions and neutral atoms. The damaged area is quantified by the damage cross-section (a ). In static SIMS the total primary ion dose should be limited so that only small portion of the surface is damaged, a, surface layer b, bulk c, damaged zone d, depth of damage zone r, radius of damage zone.

Surface grinding was employed to determine the groimd strength of the ceramics and the depth of damage caused by the grinding process. Two... 

Depth of damage determined by the lapping method for RBSN ceramic. 

The lapping and strength testing approach can be used to experimentally determine the effective depth of damage caused by grinding of ceramics. 

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