Compound semiconductors and superlattices

Growth of Compound Semiconductors and Superlattices by Organometallic Chemical Vapor Deposition... 

Heterostructures and Superlattices. Although useful devices can be made from binary compound semiconductors, such as GaAs, InP, or InSb, the explosive interest in techniques such as MOCVD and MBE came about from their growth of ternary or quaternary alloy heterostmctures and supedattices. Eor the successful growth of alloys and heterostmctures the composition and interfaces must be accurately controlled. The composition of alloys can be predicted from thermodynamics if the flow in the reactor is optimised. Otherwise, composition and growth rate variations are observed... 

Initially, a thin layer flow cell (Fig. 19) was used in this group to study the EC ALE formation of compounds [158] and in studies of electrochemical digital etching [312,313], Wei and Rajeshwar [130] used a flow cell system to deposit compound semiconductors as well, however, the major intent of that study was to form superlattices by modulating the deposition of CdSe and ZnSe. Their study appears to be the first example of the use of a flow electrodeposition system to form a compound semiconductor superlattice. 

Very low pressure processes (—1.3 Pa) have also been used for the growth of single-crystalline Si at relatively low temperatures (22, 23). Low-pressure operation is also advantageous for the growth of compound-semiconductor superlattices by reducing flow recirculations and improving interface abruptness (24). 

Banga D, Stickney JL (2007) PbTe - PbSe superlattice formation by electrochemical atomic layer deposition. ECS Trans 6 (2, State-of-the-Art Program on Compound Semiconductors 46 (SOTAPOCS 46) and Processes at the Semiconduc-tor/Solution Interface 2) 439-449... 

Variations of the colloidal-synthesis and size selection techniques have also been developed in parallel for the preparation of semiconductor nanoparticles, particularly II-VI compounds such as CdSe [3.149], from which self-assembled superlattices can be grown [3.150]. GaAs nanocrystals have been produced similarly [3.151]. 

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