Complex thin films

Sputtered Neutral Mass Spectrometry (SNMS) is the mass spectrometric analysis of sputtered atoms ejected from a solid surface by energetic ion bombardment. The sputtered atoms are ionized for mass spectrometric analysis by a mechanism separate from the sputtering atomization. As such, SNMS is complementary to Secondary Ion Mass Spectrometry (SIMS), which is the mass spectrometric analysis of sputtered ions, as distinct from sputtered atoms. The forte of SNMS analysis, compared to SIMS, is the accurate measurement of concentration depth profiles through chemically complex thin-film structures, including interfaces, with excellent depth resolution and to trace concentration levels. Genetically both SALI and GDMS are specific examples of SNMS. In this article we concentrate on post ionization only by electron impact. 

Complete elemental analysis of complex thin-film structures to several pm depth, with excellent depth resolution... 

The SIMS analytical ion signal of a specific element or isotope also can be enhanced by selective ionization of particular atoms, and the detection limit for that element thereby improved. This mode of SNMS is important to specific applications, but it lacks the generality inherent in nonselective SNMS methods. The focus of this article will be on the methods for obtaining complete, accurate, and matrix-independent compositions of chemically complex thin-film structures and materials. 

In summary, the forte of SNMS is the measurement of accurate compositional depth profiles with high depth resolution through chemically complex thin-film structures. Current examples of systems amenable to SNMS are complex III-IV laser diode structures, semiconductor device metallizations, and magnetic read-write devices, as well as storage media. 

The model catalysts studied were thin films of Pd supported on a flat SiOj substrate. These were selected on the basis of our previous work with Pd on graphite [6,9] which demonstrated that the STM micrograph of single particles was very complex. Thin films provide, in principle, a catalytically active flat surface that can be easily imaged by STM and AFM,... 

FIGURE 11. (a) EL spectrum of a Eu + complex as emitting layer in the ito/mtcd/[Eu(tta)3(tppo)2]/ Alq/Al OLED device with bias voltage of 22 V and (h) PL spectrum of the [Eu(tta)3(tppo)2] complex thin film. Reproduced with permission from Reference 134, Copyright 2002 Sodedade Brasileira de Fisica... 

In this chapter we present an overview of characteristic results obtained with the ICB deposition method and its applications. The following section deals with the combined ICB and TOFMS system. A few kinds of organic complex thin films... 

V. FABRICATION OF ORGANIC AND ULTRAFINE METAL PARTICLE COMPLEX THIN FILMS... 

Usually, a particle of less than 10 nm is called a cluster. They possess many special properties and application fields, such as electro-optical devices. So far, suspensions of clusters in an inert gas atmosphere have mostly been studied, and there have been fewer studies of suspensions in semiconductors and in organic polymer thin films. Because of the special optical and electronic propoties and potential applications of metal-cluster organic complex thin films, we have studied the structures and properties of these organic polymer thin films. In this section, we will present the structural properties of Au-PE and Ag-PE thin films [28,29]. 

VII. ELECTRICAL PROPERTY OF ORGANIC COMPLEX A. Cgo-TCNQ Complex Thin Film [39-41]... 

The three-layer Ag-TDCN thin films were examined by TEM (Fig. 23a-c). After the last layer of TDCN was deposited, the morphology of the Ag-TDCN thin film changed greatly compared with the two-layer Ag-TDCN thin film. The dark-field technique was used in the TEM examination, and we found that there were many Ag UFPs in the organic complex thin films. In this experiment, some of the... 

Gao, H. J., Xue, Z. Q and Pang, S., Functional organic complex thin films for electronic devices. Proceedings of the Second Academic Conference of Young Scientists, 1995, pp. 513-518 (in Chinese). 

Gao, H. J., Studies on the organic functional complex thin films for ultrahigh density data storage, Ph.D. Dis.sertation, Peking University, P. R. China, 1994. 

Xue, Z. Q., Gao, H. J., and Pang, S. J., Organic complex thin films for ultrahigh density data storage, in Electrical and Optical Polymer Sy.stems Fundamentals, Methods, and Application (Wise, D. L., Trantolo, D. J., Wnek, G. E.), World Scientific, Singapore, 1996. 

The following example will illustrate a comparison between conventional 20/(d scan and the corresponding RLM from a complex thin film stmcture. 

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