Complementary metal oxide semiconductor-based sensors

Integrated complementary metal oxide semiconductor-based sensors for gas... 

M. Graf, D. Barrettino, S. Taschini, C. Hagleitner, A. Hierlemann, and H. Baltes. Metal-Oxide-Based Monohthic Complementary Metal Oxide Semiconductor Gas Sensor Microsystem , Analytical Chemistry 76 (2004), 4437-4445. 

Kummer AM, Hierlemann A, Baltes H (2004) Tuning sensitivity and selectivity of complementary metal oxide semiconductor-based capacitive chemical microsensors. Anal Chem 76 2470-2477 Lakowicz JR (1999) Principles of fluorescence spectroscopy, 2nd edn. Kluwer Academic/Plenum, New York LambeckPV (1992) Integrated opto-chemical sensors. Sens Actuators B 8 103-116... 

It then addresses the micro-hotplates concept that has led to the development of different types of micromachined gas sensor devices. The different reahzations of micromachined semiconductor gas sensors are presented thin- and thick-film metal-oxide, field effect, and those using complementary metal-oxide semiconductors (CMOSs) and silicon-on-insulator (SOI) technologies. Finally, recent developments based on gas sensitive nanostructures, polymers, printing and foil-based technologies are highlighted. 

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