Charge Injection Device Imagers

A charge injection device (CID) imager [1,2] comprises an array of horizontal row lines and output column lines. Each row line is connected to row-MIS electrodes. Each MIS in a given row can interchange charge with only one column MIS well with each of the column MIS wells in a row being attached to a different column output line. 

A thin recombination layer is employed between a substrate and a photodetective layer in the imager of JP-A-61067958. The lattice constant of the recombination layer is different from the lattice constant of the substrate and the photodetective layer. To prevent misfit dislocation, the thickness of the recombination layer is chosen to be thinner than a critical value. 

The design of the imager presented in US-A-5171994 eliminates previously used optical windows consisting of a conductive thin semi-transparent chromium layer. The elimination of the chromium optical window results in an increased pixel-to-pixel uniformity, fabrication with only four mask levels and an increase in wafer yield. The detector is claimed in this patent while the method of fabrication of the device is claimed in US-A-5130259. 

A detector element in which amplification of photon-generated charge takes place by avalanche multiplication is disclosed in US-A-4912536. 

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J. C. Kim InSb Charge Injection Device Imaging Array , IEEE Trans. ED-25,323-341 (1978)... 

Charge coupled device (CCD) A solid-state two-dimensional detector array used for spectroscopy and imaging. Charge-injection device (CID) A solid-state photodetector array used in spectroscopy. 

Figure 14.10 Optical scheme for a spectrophotometer with an echelle grating. For clarity only the central section of the beam issuing from source 1 is represented (this beam should cover the whole mirror 2). The echelle grating 5, separates the radiations arriving from the source in the horizontal plane (in x). The prism then deviates the radiation in the vertical plane (in y). The path of three different spectral lines is shown. The images of the entrance aperture 2 are in the focal plane 8. In the past, to detect these radiations, photomultiplier tubes (PMT) of reduced size were installed in specific places, but now charge transfer devices (charge coupled or charge injection devices, CCD/CID) are used, as an electronic equivalent of photographic plates. This allows a continuous spectral cover from 190 to 800 nm with excellent resolution. Sensors of 500 X 2000 pixels (each 12 x 12p,m) are now used.

A wide variety of solid-state detectors consisting of multiple elements (multiple channels) have been developed over the past 20 years (140). Devices that fall into this category include silicon photodiode (SPD) arrays, charge injection devices (CID), charge coupled devices (CCD), microchannel plate (MCP) image inten-... 

Break-up of a liquid column of mineral oil just after exiting the orifice of a triode-type charge injection device (adapted from Ref. 52). Flow direction is from top to bottom of the image. 

The main detectors used in AES today are photomultiplier tubes (PMTs), photodiode arrays (PDAs), charge-coupled devices (CCDs), and vidicons, image dissectors, and charge-injection detectors (CIDs). An innovative CCD detector for AES has been described [147]. New developments are the array detector AES. With modem multichannel echelle spectral analysers it is possible to analyse any luminous event (flash, spark, laser-induced plasma, discharge) instantly. Considering the complexity of emission spectra, the importance of spectral resolution cannot be overemphasised. Table 8.25 shows some typical spectral emission lines of some common elements. Atomic plasma emission sources can act as chromatographic detectors, e.g. GC-AED (see Chapter 4). 

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