Cat-CVD

Schroeder, B. 2003. Status Report Solar Cell Related Research and Development Using Amporphous and Microcrystalline Silicon Deposited by HW (Cat) CVD. Thin Solid Films, Vol. 430, pp. 1-6. 

NANOCRYSTALLINE p-SiC FILMS GROWN BY CAT-CVD WITH PRECARBONIZATION PROCESS... 

Nanocrystalline cubic SiC (P-SiC) films were grown on silicon (100) substrate by catalytic chemical vapor deposition (Cat-CVD) at a temperature as low as 300°C with a pre-carbonization process. To enhance nucleation density of P-SiC, a buffer layer was made by carbonizing the substrate surface. From the comparison between both carbonized sample and non-carbonized sample, the precarbonization process has beneficial effects on the growth of nanociystalline p-SiC films. Mechanistic interpretations are given to explain the carbonization process and catalyzing deposition process. 

There are some reports [7,8] about preparing a-SiC and p-SiC films at low temperature by Cat-CVD and other methods, such as magnetron sputtering and plasma enhanced CVD (PECVD). In order too get high quality p-SiC films, the substrate temperatures are still high (400 600°C). Furthermore, the growth mechanism of P-SiC films by Cat-CVD is not well understood. In this work, by using Cat-CVD with precarbonization process, nanocrystalline p-SiC films were successfully synthesized on Si substrate at the low substrate temperature of 300 C. 

Combined with the pre-carbonization process, nanocrystalline P-SiC films were deposited on (100) silicon by (Cat-CVD) at a low temperature (300°C). From the FTIR spectrum it is found that the carbonized sample is composed of P-SiC component which shows a blue shift, and the XRD patterns show that the grain-size of the carbonized sample is smaller. 

Peeling of Si films tends to be suppressed also by using precursor a-Si films with less amount of hydrogen content [33], as in the case of EL A. From this point of view, catalytic chemical vapor deposition (Cat-CVD), which can... 

Thermal (resistively heated wires/filaments) No Hot Wire CVD (HWCVD) or hot filament (HFCVD) or catalytic-CVD (cat-CVD)... 

Deshpande R, Dillon AC, Mahan AH, Alleman J, Mitra S (2006) Hydrogen adsorption in single-walled and multi-walled carbon nanotubes grown in a hot-wire CVD (Cat-CVD) reactor. Thin Solid Films 501(l-2) 224-226... 

Carbon Composites. Cermet friction materials tend to be heavy, thus making the brake system less energy-efficient. Compared with cermets, carbon (or graphite) is a thermally stable material of low density and reasonably high specific heat. A combination of these properties makes carbon attractive as a brake material and several companies are manufacturing carbon fiber—reinforced carbon-matrix composites, which ate used primarily for aircraft brakes and race cats (16). Carbon composites usually consist of three types of carbon carbon in the fibrous form (see Carbon fibers), carbon resulting from the controlled pyrolysis of the resin (usually phenoHc-based), and carbon from chemical vapor deposition (CVD) filling the pores (16). 

Plasma polymerization is a vapor phase-activated (by plasma) A/D-coupled CVD. Parylene polymerization is a vapor phase-activated (by thermal process) A/D-decoupled CVD. Cascade arc torch (CAT) polymerization is a vapor phase-activated (by plasma) A/D-decoupled CVD. General CVD is a surface-activated (by thermal process) A/D-coupled CVD. HWCVD is a hot wire activated A/D-decoupled CVD. Coupled and decoupled refer only to the spatial separation. 

CAT SWNTs, prepared by Southwest NanoTechnologies, Inc. using a CVD method with Co-Mo catalysts, and discriminate the helical arrangements of the hexagons in chiral SWNTs. Computer-generated complex structures between the stereoisomers of (6,5) SWNTs and (S)-46 (Y = CH) are illustrated in Fig. 13. This resulted in obtaining optically active SWNTs for the first time. 

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