Single-layer resist based

Expression of function C i(A) for the range of small parameters was derived above. We will suppose that the single-layered transmitter coil and the measuring ring are placed on a nonconducting base, and they have the same radius. Then for the component of the electrical field E when the surrounding medium has resistivity p and field 2, as there is also an interface between media with resistivities p and p2, we obtain, respectively ... 

Finally, we will consider the last case where a single-layered coil presenting the induction probe is placed on the nonconducting base. Making use of results obtained above we have the following expressions for the electromotive force and active resistance introduced into a coil by induced currents in a medium with conductivity ct] ... 

Deep-UV resists are used in two principal modes as surface resist in single layer mode, or as the thick planarizing layer in portable conformable mask (PCM) bilayer mode. In the single layer mode, the use of deep-UV resists provides improved resolution, while in the PCM mode, a deep-UV resist is used in combination with a conventional resist to make use of the wavelength selectivity of the two types of resists. The PCM process (Figure 5.47) first exposes and develops the conventional novolac-based thin top resist using a 436 nm masked exposure. A second full exposure is then made in the deep-UV, which is... 

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