Silicon surface damage

Lubricants sometimes are added to reduce the effects of friction in use an example would be silicone oil—which gives mouldings with high gloss and when these mouldings are transported in bulk helps to reduce surface damage caused by rubbing between then. 

Electron spin resonance lines associated with mechanical surface damage have been observed by Fletcher et al (38) and Feher (39) in silicon, and by Walters (40) in germanium. Feher... 

Recent developments in microelectrome-chanical systems (MEMS) have enabled the integration and fabrication of numerous micro components such as pumps, valves, and nozzles into complex high-speed microfluidic machines. These systems possess geometrical dimensions in the range 1-1,000 pm, which are 10-10 -10-10" times less than conventimial machines, and operate at liquid flow speeds up to 300 m/s. It has been confirmed that microfluidic systems, like their large-scale counterparts, are susceptible to the deleterious effects of cavitation when appropriate hydrodynamic conditions develop. Cavitation damage in micro-orifices has been reported by Mishra and Peles [2], Small pits on the silicon surface have been detected after only 7-8 h of operation under cavitating flow. 

The results of the experiments illustrate the influence of different parameters of the fretting fatigue loading on the lifetime behavior of alumina and silicon nitride and the surface damage introduced by fretting fatigue,... 

Fig. 8.38 Fractography of ceramic fatigue showing nominally identical fracture surfaces under, respectively, monotonic and cyclic loading in (a, b) alumina (Coors 99.5 %) and (c, d) silicon nitride (hot-pressed with 7 wt% AI2O3 + Y2O3). Note, however, the mote debris and surface damage on the fatigue surfaces [4]. With kind permission of Professor Ritchie...

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