Oxygen semiconductor sensors

The history of electrochemical sensors began in the thirties of the twentieth century, when the pH-sensitive glass electrode was deployed, but no noteworthy development was carried out till the middle of that century. In 1956, Clark invented his oxygen-sensor based on a Ft electrode in 1959, the first piezoelectric mass-deposition sensor (a quartz crystal microbal-ance) was produced. In the sixties, the first biosensors (Clark and Lyons, 1962) and the first metal oxide semiconductor-based gas sensors (Taguchi, 1962) started to appear. 

Fig. 8.5 Time courses of output signals of semiconductor-type oxygenate sensors, potentiometric CO sensor and ND-IR C02 sensors. The delay of CO gas sensor was due to the resistance of active carbon filter which removes oxygenate compounds (reproduced by permission of Elsevier from [19]).

Johansson, M., Lundstrom, I. and Ekedahl, L., Bridging the pressure gap for palladium metal-insulator-semiconductor hydrogen sensors in oxygen containing environments , I. Appl. Phys., 1998,84,44-51. 

Electronic and electrochemical detectors There are several different types of electronic or electrochemical detector for CO of which metal oxide semiconductor (MOS) sensors and electrolytic cells are the most common. In MOS detectors CO is oxidized on a heated tin oxide semiconductor where surface-adsorbed oxygen oxidizes gases such as CO and hydrocarbons producing electrons that enter the conduction band of the semiconductor thereby reducing its resistance ... 

Titanium dioxide is an n-type semiconductor that is used in thin-film oxygen and humidity sensors [155, 156]. Doping with other metal oxides (e.g., iron oxides) increases the sensitivity and selectivity of the titania oxygen sensors [157, 158]. In comparison to zirconia, titania sensors have a better resistance against lead poisoning. 

Bergveld (7 ) was, of course, the first to report an ISFET as a chemically sensitive semiconductor device (CSSD). A broader grouping is that of chemically sensitive electronic devices CSEDs), sub-classified by Bergveld and van der Schoot (75) into ISFETs as "active electronic components as one member of a four-class system. Other categories are passive electronic components (resistor, capacitor, etc.), electronic and opto-electronic systems (oscillating crystal sensors, etc.), and systems with a chemical feedback (dynamic oxygen sensor, and coulometric sensors). 

Prusseit W, Corsepius S, Zwerger M, Berberich P, Kinder H, Eibl O, Jaekel C, Breuer U, Kurz H (1992) Epitaxial YBajCUjO. 5 films on silicon using YSZ/Y O buffer layers. Physica C 201 249-256 Randhaw H (1991) Review of plasma-assisted deposition processes. Thin Solid Films 196 329-349 Saji K, Kondo H, Takahashi H, Futata H, Angata K, Suzuki T (1993) Development of a thin-film oxygen sensor for combustion control of gas appliances. Sens Actuators B 13(14) 695-696 Sze SM (ed) (1994) Semiconductor sensors. WUey, New York Tiemann M (2008) Repeated templating. Chem Mater 20 961-971... 

Progress in semiconductor technology during recent years has made it possible to miniaturize the classical oxygen sensor [74] - [77] for use as a transducer in several chemical and biochemical sensors. 

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