Chemically sensitive electronic

Despite the advances in CHEMFET s and other chemically sensitive electronic devices, they have not yet achieved commercial success. Assuming the performance (precision, accuracy, response time, thermal sensitivity, durability, etc.) of these devices can match or exceed that of conventional pH electrodes, the only issue concerning their viability as alternatives is cost. With the apparent successes in automation of the entire CHEMFET process for pH devices it seems likely that some degree of commercialization will be achieved if attractive preliminary performance claims associated with some recently reported CHEMFET devices are corroborated. 

Recent Advances in Chemically Sensitive Electronic Devices... 

In the past decade, microfabrication methods developed in the microelectronic industry have led to new opportunities for device research and development involving chemically sensitive electronic structures. In 1980, this subject was reviewed in depth at a NATO Advanced Study Institute (1). Over the last five years, there have been three international conferences 2-k), devoted to sensors with a strong emphasis on chemical sensors as well as a number of national and specialized meetings on the subject (5,6). In this paper, some recent developments that will have long term consequences on the study of chemically sensitive electronic devices will be reviewed. To simplify the discussion, the topics are divided into the following categories ... 

Advanced Study Institute on "Chemically Sensitive Electronic Devices", J. N. Zemel and P. Bergveld, Eds. (Elsevier Sequoia, Lausanne, Switzerland, 1981). Also published as Sensors and Actuators, Volume 1, (1981). 

S. J. Pace, Chemically Sensitive Electronic Devices, 1980, Elsevier Sequoia... 

Bergveld (7 ) was, of course, the first to report an ISFET as a chemically sensitive semiconductor device (CSSD). A broader grouping is that of chemically sensitive electronic devices CSEDs), sub-classified by Bergveld and van der Schoot (75) into ISFETs as "active electronic components as one member of a four-class system. Other categories are passive electronic components (resistor, capacitor, etc.), electronic and opto-electronic systems (oscillating crystal sensors, etc.), and systems with a chemical feedback (dynamic oxygen sensor, and coulometric sensors). 

R. P. Buck, in Chemically Sensitive Electronic Devices—Proceedings of NATO Advanced Study Institute (P. Bergveld, J. Zemel, and S. Middelhoek, eds.) (Elsevier, Amsterdam, 1981) pp. 197-260. 

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