Scanned Probe Microscopy electron tunnelling

Scanning electron microscopy, 125 Scanning probe microscopy, 46 Scamring tunneling microscopy, 46 Screen-printing technology, 111, 177, 178, 195... 

For direct patterning on the nanometer scale, scanning probe microscopy (SPM) based techniques such as dip-pen-nanolithography (DPN), [112-114] nanograftingf, nanoshaving or scanning tunneling microscopy (STM) based techniques such as electron induced diffusion or evaporation have recently been developed (Fig. 9.14) [115, 116]. The SPM based methods, allows the deposition of as-sembhes into restricted areas with 15 nm linewidths and 5 nm spatial resolution. Current capabihties and future applications of DPN are discussed in Ref. [117]. 

It should be noted that most of the microstructural data to be presented rely on different characterization techniques using electron microscopy in combination with other scanning probe microscopy techniques, e.g. scanning tunneling microscopy (STM) and atomic force microscopy (AFM). The details of specimen preparation and the analysis techniques of electron microscopy are described in other chapters of this book and are therefore not further covered in this chapter. The references provided in the chapter are merely a selection, since the field of research is vivid and the number of publications is large. The goal is to show the salient features which can be further explored by use of the referenced literature. 

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