SEARCH Articles Figures Tables Elucidating how photoacid diffusion leads to resist contrast and resolution loss Negative electron beam resists resolution Resist materials resolution Resist resolution limit issues Resolution cross-linking negative resists Resolution electron resists Resolution limit issues of resists Resolution limits due to chemical amplification in resists Resolution limits due to confinement effects in resists Resolution limits due to resist polymer molecular properties Resolution of resists Resolution photo-resist material Thick resists resolution determination