Resist electron-beam vinyl

Figure 42. A plot of proton beam vs electron beam sensitivity for several resist systems. COP is a copolymer of glycidyl methacrylate and ethyl acrylate, PVC is poly (vinylcinnamate), PCS is poly (chlorostyrene), PTBMA is polyO-butyl methacrylate), PVA is poly (vinyl acetate), PMMA is poly (methyl methacrylate). (Reproduced with permission from Ref. 57 J...

These vinyl systems were chosen also because they function as high-resolution electron beam resists and deep UV resists at X<300 nm. 

Vacuum Curing Effect. In the early stage of this work, we investigated a mixture of epoxy novolac and poly(p-vinyl phenol) (EP) to obtain an electron beam sensitive non-swelling resist. Epoxy novolac was chosen as the sensitizing component, because epoxy groups are known to be electron-beam-sensitive substituents (2). However, it is also known that electron beam resists... 

The negative electron beam resists as shown in Table VII are based on vinyl polymers —... 

Pittman, M. Ueda, C. Chen, C. Cook, J. Helbert, and J. Kwiatkowski, Synthesis, radiation degradation, and electron beam resist behavior of fluorine containing vinyl polymers, J. Electro chem. Soc. 128, 1759 (1981) M. Kakuchi, S. Sugawara, K. Murase, and K. Matsuyama, Polymeric resist mask composition, U.S. Patent No. 4,125,672 (1978). 

Vinyl acetate and 3-methyIcyclopentene-S02 terpolymers have also been reported to be usehil as electron beam resist mediums [61c]. The polymer obtained is a VAc/3-methyIcyclopentene/S02 terpolymer. This terpolymeriza-tion was reported to occur at — 60°C using f-BuOOH as the initiator. 

The effect of electron beam irradiation on the miscible poly(styrene) and poly(vinyl methyl ether) (PVME) blend has been studied. The poly (styrene), being much more resistant to effects of irradiation, does not offer any protectimi to the poly(vinyl methyl ether). Gel content studies indicated significant crosslinking [199]. Further studies of this... 

Vinyl ester resins (epoxy diacrylates) are used by the glass-fibre-reinforcement industry for products that are resistant to chemicals and corrosion. They are epoxy di(meth)acrylates (P-hydroxyester acrylates) that are usually obtained by reacting epoxy resins of glycidyl derivatives with (meth)acrylic acid. They can also be manufactured from bisphenol A and glycidyl (meth) acrylates (Kanerva et al. 1986 Kanerva et al. 1989 Jolanki 1991). Acrylates based on bisphenol A or epoxy resin can be polymerised by electron beams, ultraviolet light, and also by the addition of various peroxides (Jolanki et al. 1995). The same cross-linker (styrene), hardeners (organic peroxides) and accelerators (cobalt) as for unsaturated polyester resin are used in composite epoxy acrylates (Rolston 1980). 

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