Projection printing print quality

In equation 1, bmin is the minimum feature size transferable, A is the wavelength of light, s is the separation between the mask and the substrate, and d is the thickness of the resist layer. In projection printing, a series of undulating maxima and minima are produced. Because of mutual interference, the dark region is never completely dark, and the maximum brightness does not correspond to 100% transmission. The quality of transfer can be conveniently indicated by the modulation index, M, which is defined as follows ... 

Lease negotiations were concluded and MACCS was installed on the MSDRL VAX in November, 1984. A few project files were generated from CSIS. These provided opportunities to refine the CSIS conversion programmes and develop quality control procedures. Four chemists were hired and trained for the quality control work, and the database conversion began in the second quarter of 1985. CSIS records were converted in blocks of 6,000 records each and in L-number order. The L-numbers from each batch that failed to generate a connection table were saved in a separate file. A CSIS structure print and the corresponding MACCS plot were manually compared by the quality control staff for each record that was converted. Approximately 30% of these required some correction to the structure diagram and/or the text data. 

Because of the voluminous work for the treatise, this project was spread over almost two years, from concept to print. We would like to acknowledge cooperation, patient and support of our contributors who have put their serious efforts to ensure the high scientific quality of this book with up to date information. 

How many copies of the CQF are needed The answer is as few as possible consistent with project needs. An excessive number of copies turns the site office into a printing shop and more importantly brings the system into disrepute. The absolute minimum is a single CQF made up of original documents, but it is safer to establish a second CQF copy in another location as a back-up. Very special attention must be focussed on documents required as part of the authorities approval process. The best way to ensure that a construction contractor is motivated to produce quality records and to continue to build up the CQF is to subject payment for works completed to the presentation of the corresponding quality records. 

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