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Process instrumentation MEMS

Perhaps the best example of antistiction technology for MEMS to date is the coating process employed by Texas Instruments on the DMD device. The DMD... [Pg.3054]

Lab-on-valve , Lab-on-chips , Micro Total Analytical Systems (p-TAS) or Micro Electro Mechanical Systems (MEMS) that operate on micro- and nanometer scales are good examples of new trends and achievements in the area of instrumentation. These enable complex processes such as sampling, reagent addition, calibration, temperature control, and analysis, to be incorporated into... [Pg.178]

The anisotropic wet etching of silicon is a unique fabrication process in the MEMS field. The need to develop new processes to fabricate functional 3D microstructures in various materials is urgent for progress in microfluidic systems, micro-sensors, micro-actuators and micro-instrumentation. At present, to integrate surface micro-machined devices and standard IC devices with bulk micromachined structures to demonstrate a new functional... [Pg.172]

See other pages where Process instrumentation MEMS is mentioned: [Pg.175]    [Pg.1127]    [Pg.11]    [Pg.143]    [Pg.168]    [Pg.173]    [Pg.109]    [Pg.109]    [Pg.32]    [Pg.195]    [Pg.322]    [Pg.3049]    [Pg.190]    [Pg.212]    [Pg.222]    [Pg.501]    [Pg.214]    [Pg.27]    [Pg.2518]    [Pg.2543]    [Pg.34]    [Pg.43]   
See also in sourсe #XX -- [ Pg.174 ]



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