Plasma treatments, atmospheric pressure oxygen

Adhesion to the film can be enhanced by surface treatment. The conventional method is corona discharge but more recently atmospheric pressure oxygen plasma treatments have been developed. The film can also be vacuum metallised to improve barrier performance, coated with copper for surface conductivity or with more advanced coatings such as sapphire. Mineral fillers can be used to provide higher modulus and to the control coefficient of thermal expansion in relation to particular coatings or specific applications. 

Vacuum RF-plasma machine (Make Vico) as well as atmospheric pressure plasma was used for plasma treatment of polyester fabric. For vacuum plasma, initial vacuum used was 10" Torr and the vacuum used during the treatment was 0.2-0.1 Torr. In this plasma system, the excitation frequency of 13.56 MHz was used. Oxygen gas flow maintained during the treatment was 20 SCCM and the power kept at 80W. 

From the materials design point of view for those electrical conductive oxides which are stable under an oxygen potential gradient, oxide intercoimects and coating materials for alloys are quite similar. From the fabrication method, however, there are several differences. Inexpensive sintering process can be applied for oxide interconnects, whereas high-temperature heat treatment is limited for coating. The low-pressure plasma splay technique was successfully adopted to form dense films however, from the cost point of view, this is not appropriate. The atmospheric pressure plasma splay is more cost effective, but the quality of fabricated films is not excellent. 

For increasing the corrosion resistance of metals and alloys they were exposed from 1 s to 10 min in cold plasma under pressure 1-103 Pa and 100-5000 V in atmosphere containing O, O3, N2, H2, air, CO2, CO, N-oxides, H2O (gas), combustible gas and/or inert gas. Thus, 17% Cg-ferrite stainless steel is subject to plasma treatment for 4 min at 103 Pa, 100 mA and 250 V in nitrogen-oxygen mixture with 20% oxygen. The corrosion... 

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