Plasma polymerization microwave discharge

Figure 1.3 clearly demonstrates the luminous gas phase created under the influence of microwave energy coupled to the acetylene (gas) contained in the bottle. This luminous gas phase has been traditionally described in terms such as low-pressure plasma, low-temperature plasma, nonequilibrium plasma, glow discharge plasma, and so forth. The process that utilizes such a luminous vapor phase has been described as plasma polymerization, plasma-assisted CVD (PACVD), plasma-enhanced CVD (PECVD), plasma CVD (PCVD), and so forth. 

Davies PB, Isaacs NA, Johnson SA, Resell DK. Detection of SiH(X 2) fundamental and hot band transitions by diode laser absorption spectroscopy. J Chem Phys. 1985 83 2060-3. Rudolph RN, Moore JH. Plasma polymerization and a-C H film ablation in microwave discharges in methane diluted with argon and hydrogen. Plasma Chem Plasma Proeess. 1990 10 451-71. 

The new experimental set-up of the cold remote rritrogen plasma assisted polymerization reactor was adapted fiom [5,14]. Details can be fotrrtd in [15], Smnmarising, the nitrogen flow was excited by a microwave discharge (2450 MHz-200 W) in a fused silica tube. By continuous ptrrrtping (roots pump Pfeiffer), the reactive... 

The main difference between plasma surface treatment and corona surface treatments is the nature of the plasma (specialty gas vs. air) and the operating pressure of the plasma (0.1-10 torr vs. 760 torr). With the plasma treatment technique, a low-pressure inert gas is activated by an electrodeless radio frequency discharge or microwave excitation to produce metastable excited species that react with the polymeric surface. 

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