Plasma electrons, energy

Let us discuss further collisions and reactions in chemical etching of Si and Si02 in a CF4 plasma. Electron energy-loss spectra (Kuroki et al, 1992) of CF4 show broad bands without vibrational structure, indicating that most of the low-lying excited states have repulsive adiabatic potential surfaces, leading to immediate dissociation. In other words, electron collisions mostly result in the dissociation of CF4 into CF3, CF2, CF, and other radicals (Winters and Inokuti, 1982), which are all chemically reactive, as represented by... 

Figure C2.13.1. Electron energies and electron densities for different plasmas.

Figure C2.13.2. Electron energy distributions/(U) for a mean electron energy of 4.2 eV, Maxwell distribution (M), Dmyvesteyn distribution (D) and a calculated distribution (Ar) for an Ar plasma [12].

Gorse C and Capitelli M 1996 Non-equilibrium vibrational, electronic and dissociation kinetics in molecular plasmas and their coupling with the electron energy distribution function NATO ASI Series C 482 437-49... 

Microwaves may be used to ionize gases when sufficient power is apphed, but only through the intermediate process of classical acceleration of plasma electrons. The electrons must have energy values exceeding the ioniza tion potential of molecules in the gas (see Plasma technology). Ionizing radiation exhibits more biological-effect potential whatever the power flux levels (2). 

Central to the categorization of plasmas are electron temperature and electron density. Electrons have a distribution of energies, so it is useful to assume a MaxweUian distribution, in terms of electron energy, E, such that... 

Plasma Types. Eigure 1 (7—9) indicates the various types of plasmas according to their electron density and electron temperature. The colder or low electron energy regions contain cold plasmas such as interstellar and interplanetary space the earth s ionosphere, of which the aurora boreaUs would be a visible type alkaU-vapor plasmas some flames and condensed-state plasmas, including semiconductors (qv). 

Fig. 3.31. Distributions (i)/(Ee) dEe of electron energy (E ) for a low-pressure HF-plasma (suffix pi, Maxwellian with temperature = 80000 K) and an electron beam (suffix eb, simplified to Gaussian shape with 40 eV half-width) (ii) rTx (Ej) ofthe Ej dependent electron impact ionization cross-section for X=Ti...

Flames are also plasmas, characterized by electron densities of about 10 /cm and electron energies of about 0.5 eV. Many excited species are present in the flame, namely free radicals, ions, excited atoms and molecules, and electrons [43]. Excited species that have been observed include O, OH, NH, NO, and CH [44]. 

Figure 13. Electron energy distribution functions of a CH4/H2 plasma as a function of pressure, (a) 50 mTorr. (b) 40 mTorr. (c) 30 mTorr. (d) 20 mTorr. (e) 10 mTorr. Reprinted with permission from [88], K. Okada et al., J. Vac. Sci. TechnoL, A 17, 721 (1999). 1999, American Institute of Physics.

Electron energy distribution function The distribution function of electrons in a plasma. That of a low-pressure radiofrequency plasma generally consists of two Maxwellian distributions, that is, fast and slow electrons. 

For low-pressure plasmas containing mainly inert gases the electrons can be characterized by a Maxwellian electron energy distribution function (EEDF). How-... 

The decrease of the silane partial pressure and the concomitant increase of the hydrogen partial pressure as a function of plasma power can be understood in terms of the increased electron density and electron energy. Both lead to a higher dissociation of silane and hydrogen. The silane radicals and atomic hydrogen thus... 

Kang et al. and Wallis el al. [102,103] suggested that plasma electrons with mean energies of 3-4 eV impacting the Ti02 surface can produce electron-hole pairs in the same manner as photon absorption ... 

The various contributions to the energy of a molecule were specified in Eq. (47). However, the fact that the electronic partition function was assumed to be equal to one should not be overlooked. In effect, the electronic energy was assumed to be equal to zero, that is, that the molecule remains in its ground electronic state. In the application of statistical mechanics to high-temperature systems this approximation is not appropriate. In particular, in the analysis of plasmas the electronic contribution to the energy, and thus to the partition function, must be included. 

The principle of ICP-AES is that atoms (or sometimes ions) are thermally excited, in a plasma torch, to higher energy levels, these atoms or ions then relax back to lower electronic energy levels by emitting radiation in the UV-visible region. The emitted radiation is detected and used to determine which elements are present, and their concentration. Analysis of organometallic and inorganic additives, based on the ICP-AES determination of specific metal ions, is routinely undertaken. 

In the cross modulation experiments (Mentzoni and Row, 1963 Mentzoni and Rao, 1965), an electron plasma is briefly heated by a microwave pulse while a weak microwave signal probes the mean electron energy. Assuming no electron loss and insignificant ambient gas heating, these authors derived the following equation for the relaxation of electron Maxwellian temperature T.toward the ambient temperature T ... 

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