Low Energy Electron and Particle Plasma, Corona Discharge

3 Low Energy Electron and Particle (Plasma, Corona Discharge) 

Plasma-based Ar+ beam performed in RF (13.56 MHz) low-pressure (200 mTorr) glow discharge (at 100 W, 1200 W and 

2500 W) with a serial capacitance for surface modification of PDMS try to combine some advantages of both ion-beam and plasma treatment, namely the durability of the modifying effect of the ion-beam with the simplicity of the plasma as compared to ion-beam equipment. The presence of a serial capacitance ensures arise of an ion-flow inside the plasma volume directed toward the sample and the discharge power vary ensures varied ion-flow density. 

---