Plasma chemical vaporization machining PCVM

Plasma chemical vaporization machining (PCVM) and elastic emission machining (EEM) are ultraprecision machining methods based on chemical reactions that were developed in our laboratory. Their concepts and the results of basic research were described in a previous edition of Crystal Growth Technology [1, 2]. In this chapter, the results on both PCVM and EEM achieved since the first pubH-cation are described. In addition, a new abrasive-free planarization method called catalyst-referred etching (CARE) is introduced in the last part of this chapter. 

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